Wetbenches

Laboratory infrastructure > Wet processing tools

Description

A wetbench is a potentially automated process tool that is used to carry out wet etching or cleaning steps of a fabrication process.

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List of Available Tools

Tool Make and Model

Key Differentiator

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Reynolds Tech Wet Bench - Caustic Develop (USYD)

Wet Bench for caustic development processes

NSW

NSW

  • Description
  • Related Information
  • Tool Owner
  • Description

    Exhausted wet bench used for handling of caustic based chemicals – primarily TMAH based developers

  • Related Information

    Includes automated spin process unit for development of wafers up to 7 inches squared.

  • Tool Owner

Reynolds Tech Wet Bench (USYD)

Wet Bench for general purpose caustic etch processes

NSW

NSW

  • Description
  • Related Information
  • Tool Owner
  • Description

    Exhausted wet bench used for handling of general purpose caustic based chemicals

  • Related Information

    Includes integrated stirring hotplate, heated and filtered process tank and cascading tank for batch processing

  • Tool Owner

Reynolds Tech Wet Bench -Solvent Develop (USYD)

Wet bench for solvent based development processes

NSW

NSW

  • Description
  • Related Information
  • Tool Owner
  • Description

    Exhausted wet bench used for solvent based development processes

  • Related Information

    Includes cold plate for cold development processes

  • Tool Owner

Reynolds Tech Hotplate Tower (USYD)

Stacked Hotplate tower

NSW

NSW

  • Description
  • Related Information
  • Tool Owner
  • Description

    Exhausted stacked hotplates for baking during solvent based processes

  • Related Information

    Includes 4 hotplates dedicated to different temperature ranges – used for baking/outgassing purposes

  • Tool Owner

Class One Wetbench & spin dryer (UQ)

Wetbench with spin dryer

QLD

QLD

  • Description
  • Related Information
  • Tool Owner
  • Description

    The wetbench has three baths for chemical etching and one dump rinse station.

  • Related Information

    The system is primarily setup for KOH etching of silicon. The baths can be heated. In this setup batch processing can be performed.

  • Tool Owner

Amerimade Automated Wetbench Suite (MCN)

Set of wet benches for wet processing

VIC

VIC

  • Description
  • Related Information
  • Tool Owner
  • Description

    The automated wet-bench suite is comprised of three custom made instruments – a manual wet processing deck, a semi-automated chemical cleaning station and an IPA aerosol vapour dryer. All three wetbench instruments are designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. The wetbench suite significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management systems.

  • Related Information

    Manual wet processing baths – KOH, Cr etcher, 5% H2SO4, IPA and DI water. Semi-automated chemical cleaning station (enclosed, exhausted) baths – piranha, SC-2, buffered oxide etch (BOE), DI water and ultrasonic acetone de-scum station. The IPA aerosol vapour dryer dries without any need for heaters or rotation. Substrate size – Up to 6 “. Batch processing – Up to 25 wafers.

  • Tool Owner

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