Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Custom HF etching (UoA)
HF etching facilities
Optofab
Optofab
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Description
Hydrofluoric acid etching facilities.
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Related Information
Hydrofluoric etching facilities in a specialised laboratory environment. Capability to etch glass and other materials.
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Tool Owner
Custom Etcher (UQ)
XeF2 etcher
QLD
QLD
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Description
System used for isotropic etching of silicon using xenon difluoride gas.
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Related Information
This system has almost infinite selectivity to SiO2, SiN and photoresist.
Can handle up to 4 inch wafers.
Etch rate of up to several microns per minute.
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Tool Owner
ANFF-Q HF Vapour Etch (UQ)
HF Vapour Etcher
QLD
QLD
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Description
Performs dry etching of SiO2. HF vapour chemically etches SIO2 while substrate is heated
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Related Information
Allows stiction free release of mechanical structures.
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Tool Owner