Capabilities

UV Flood Exposure

Lithography > Photolithography

Description

UV flood exposure sources provide quick, non discriminant processing of UV-sensitive materials and substrates.

This can be incredibly useful when a sample doesn’t require more than one mask, or it’s an abnormal shape or size.

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List of Available Tools

Tool Make and Model

Key Differentiator

Node

OAI Model 30 UV Light Source (UQ)

UV flood exposure source

QLD

Description
Related Information
Tool Owner

Description

Collimated light source for flood UV exposure of photoresists on substrates up to 4 inches in diameter
Related Information

Can be used to support a range of applications from MEMs, Photonics, Microfluidics, Micropatterning, Optics, Electronics etc
Tool Owner

Doug Mair @ UQ

ABM Stand Alone UV Exposure System (MCN)

UV flood exposure source

VIC

Description
Related Information
Tool Owner

Description

A versatile system that floods the exposure chamber with UV light.
Related Information

This equipment can produce features that measure ~2 µm in size.

A 7-inch sample well allows for versatility and processing of relatively large or abnormally shaped substrates and samples.

Most substrate materials can be used.
Tool Owner

Ricky Tjeung @ MCN

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