Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
OAI Model 30 UV Light Source (UQ)
UV flood exposure source
QLD
QLD
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Description
Collimated light source for flood UV exposure of photoresists on substrates up to 4 inches in diameter
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Related Information
Can be used to support a range of applications from MEMs, Photonics, Microfluidics, Micropatterning, Optics, Electronics etc
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Tool Owner
ABM Stand Alone UV Exposure System (MCN)
UV flood exposure source
VIC
VIC
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Description
A versatile system that floods the exposure chamber with UV light.
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Related Information
This equipment can produce features that measure ~2 µm in size.
A 7-inch sample well allows for versatility and processing of relatively large or abnormally shaped substrates and samples.
Most substrate materials can be used.
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Tool Owner