Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
SwissLitho NanoFrazor (MCN)
Thermal Scanning Probe Lithography (t-SPL) system
VIC
VIC
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Description
1st Nanofrazor in Australia and 7th in the world.
Operates at ambient temperature, pressure, low voltage, and under N2 atmosphere.
Not reliant on ion gun or electron beam which is good when processing sensitive materials and devices.
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Related Information
Uses a 1,000°C cantilever tip to sublimate PPA resist.
Sub -10nm resolution, <2nm vertical accuracy
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Tool Owner