Thermal Scanning Probe Lithography (t-SPL)

Lithography > Direct Write Lithography

Description

Thermal Scanning Probe Lithography (t-SPL) is a 3D direct-write lithography technique that provides sub-10nm resolution with sub-2nm vertical accuracy in ambient conditions.

A 1,000°C cantilevered tip sublimates PPA resist as it scans over a sample, before the tip quickly cools to provide real-time...

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List of Available Tools

Tool Make and Model

Key Differentiator

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SwissLitho NanoFrazor (MCN)

Thermal Scanning Probe Lithography (t-SPL) system

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  • Description

    1st Nanofrazor in Australia and 7th in the world.

    Operates at ambient temperature, pressure, low voltage, and under N2 atmosphere.

    Not reliant on ion gun or electron beam which is good when processing sensitive materials and devices.

  • Related Information

    Uses a 1,000°C cantilever tip to sublimate PPA resist.

    Sub -10nm resolution, <2nm vertical accuracy

  • Tool Owner

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