Stylus profilometry

Testing and validation > Profilometry

Description

Stylus profilometry is a direct form of profilometry that can be used to characterise the surface steps and the roughness of a material.

A stylus profilometer drags a metal tip along the surface of a sample and measuring the distance traced by the stylus tip and its deflection along the vertical axis to...

Contact Us

List of Available Tools

Tool Make and Model

Key Differentiator

Node

Bruker Dektak XT (ANU)

Stylus profilometer

ACT

ACT

  • Description
  • Related Information
  • Tool Owner
  • Description

    Instrument used to measure height steps, typically after lithography or etching

  • Related Information

    System accuracy down to 10 nm

  • Tool Owner

Bruker Dektak XT-S (UoN)

Stylus profilometer

Materials Node

Materials Node

  • Description
  • Related Information
  • Tool Owner
  • Description

    Used to measure the surface roughness of samples or to determine film thickness.

  • Related Information

    55 mm scan length

  • Tool Owner

Bruker Dektak XT (USYD)

Stylus profilometer

NSW

NSW

  • Description
  • Related Information
  • Tool Owner
  • Description

    The Dektak XT profilometer is a stylus profiler capable of measuring step heights, film stress, and surface roughness. This tool has a 0.1 nm vertical resolution with a 6 inch automated stage.

  • Related Information

    Sample size of up to 6 inch wafer. Single scan size of 55 mm. Vertical range of 1 mm 

  • Tool Owner

Bruker ContourGT-K (UoA)

High precision surface profiler

Optofab

Optofab

  • Description
  • Related Information
  • Tool Owner
  • Description

    This instrument performs non-contact 3D surface metrology measurements for laboratory research and production process control.

  • Related Information

    Specifications: Maximum scan range: up to 10 mm; Vertical resolution: less than 0.01 nm.

  • Tool Owner

Veeco  Dektak 150 (UQ)

Stylus profilometer

QLD

QLD

  • Description
  • Related Information
  • Tool Owner
  • Description

    The Veeco Dektak 150 profilometer is a stylus profiler capable of measuring step heights, film stress, and surface roughness. This tool has a 0.1 nm vertical resolution with a 6” manual stage.

  • Related Information

    Sample size of up to 6 inch wafer.

    Single scan size of 55 mm.

    Maximum Z scanning range of 1024 µm. 

  • Tool Owner

Can't find what you're looking for?

This website is under development at the moment, and not everything has been uploaded yet. If you can't find something you're looking for, it doesn't mean we don't have it – get in touch to see if we can help.

Contact Us