Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Bruker Dektak XT (ANU)
Stylus profilometer
ACT
ACT
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Description
Instrument used to measure height steps, typically after lithography or etching
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Related Information
System accuracy down to 10 nm
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Tool Owner
Bruker Dektak XT-S (UoN)
Stylus profilometer
Materials Node
Materials Node
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Description
Used to measure the surface roughness of samples or to determine film thickness.
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Related Information
55 mm scan length
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Tool Owner
Bruker Dektak XT (USYD)
Stylus profilometer
NSW
NSW
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Description
The Dektak XT profilometer is a stylus profiler capable of measuring step heights, film stress, and surface roughness. This tool has a 0.1 nm vertical resolution with a 6 inch automated stage.
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Related Information
Sample size of up to 6 inch wafer. Single scan size of 55 mm. Vertical range of 1 mm
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Tool Owner
Bruker ContourGT-K (UoA)
High precision surface profiler
Optofab
Optofab
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Description
This instrument performs non-contact 3D surface metrology measurements for laboratory research and production process control.
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Related Information
Specifications: Maximum scan range: up to 10 mm; Vertical resolution: less than 0.01 nm.
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Tool Owner