Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
ASML PAS 5500/100 (USYD)
i-line Stepper
NSW
NSW
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Description
A high throughput step-and-repeat projection lithography system that can pattern feature sizes down to 350 nm
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Related Information
Well suited to demonstrating scalable batch processes on 6″ wafers at low – medium volume production.
Accepts 6″ reticles with 5x reduction in critical dimensions. Die size limited to 22 x 22mm.
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Tool Owner