Stepper

Lithography > Photolithography

Description

A stepper is a highly accurate photolithography system that enables a pattern to be repeated on a wafer many times.

The traditional photolithography process creates a pattern on a substrate by shining light from a light source onto a photoresist that coats the surface of the substrate through a photomask...

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List of Available Tools

Tool Make and Model

Key Differentiator

Node

ASML PAS 5500/100 (USYD)

i-line Stepper

NSW

NSW

  • Description
  • Related Information
  • Tool Owner
  • Description

    A high throughput step-and-repeat projection lithography system that can pattern feature sizes down to 350 nm

  • Related Information

    Well suited to demonstrating scalable batch processes on 6″ wafers at low – medium volume production.

    Accepts 6″ reticles with 5x reduction in critical dimensions. Die size limited to 22 x 22mm.

  • Tool Owner

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