Sputtering

Deposition > Physical Vapour Deposition (PVD)

Description

Sputtering is a physical vapour deposition method that involves depositing thin films in a vacuum environment. During this process, a solid material and substrate are positioned separately within a vacuum system. A high-energy argon ion plasma stream is targeted at the material, resulting in the subject...

Contact Us

List of Available Tools

Tool Make and Model

Key Differentiator

Node

AJA International ATC-2400 V (ANU)

Sputtering system

ACT

ACT

  • Description
  • Related Information
  • Tool Owner
  • Description

    Magnetron sputter system with three DC sources and three RF sources

  • Related Information

    A large choice of materials available.

    Provides reactive sputtering and co-sputtering.

  • Tool Owner

Emitech K550 (USYD)

Sputter Coater

NSW

NSW

  • Description
  • Related Information
  • Tool Owner
  • Description

    Small throw sputter coater for coating of small samples

  • Related Information

    2 inch sputter targets of Au, Ag and Ti available.

  • Tool Owner

HHV TF600 (UNSW)

Sputtering system

NSW

NSW

  • Description
  • Related Information
  • Tool Owner
  • Description

    More information to come

  • Related Information

    More information to come

  • Tool Owner

AJA International ATC-2200 (UQ)

RF/DC sputtering system

QLD

QLD

  • Description
  • Related Information
  • Tool Owner
  • Description

    The system has RF and DC sputter sources in addition to Argon, Oxygen and Nitrogen gases for reactive film deposition.

  • Related Information

    Vacuum Load lock.

    Argon, nitrogen and oxygen gases available.

    Substrate heater to 350°C.

    Wafer size up to 8 inch and wafer holder can be rotated.

  • Tool Owner

HHV TF500 (UniSA)

Sputtering system

SA

SA

  • Description
  • Related Information
  • Tool Owner
  • Description

    A 3 magnetron sputtering system for the deposition of high quality (pinhole free) metal layers.

    Able to accommodate up to 6 inch diameter substrates. Fitted with three sputter sources with a switching system to select from DC or RF power supplies. Multilayer deposition can be performed without breaking vacuum.

  • Related Information

    Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO

  • Tool Owner

Intlvac Nanochrome (MCN)

AC/DC Sputtering system with co-deposition

VIC

VIC

  • Description
  • Related Information
  • Tool Owner
  • Description

    An automated tool which can be used to deposit a wide variety of conductive thin films including metals, oxides, nitrides and alloys.

    The system allows for up to three materials to be co-deposited at once, with the option to vary the composition over time.

  • Related Information

    Can coat with three materials in the same run.

    Features ion beam cleaning.

    Recipe-based automated operation.

    Can be used to coat samples of up to 8 inches in diameter.

  • Tool Owner

Anatech Hummer BC-20 (MCN)

RF/DC sputtering system

VIC

VIC

  • Description
  • Related Information
  • Tool Owner
  • Description

    Manual tool which can be used to deposit a wide variety of conductive and non-conductive thin films including metals, oxides, nitrides and alloys.

    The system allows for up to two materials to be co-deposited at once, with the option to vary the composition over time.

  • Related Information

    Can coat with two materials in the same run.

    Features ion beam cleaning.

    Manual operation.

    Can be used to coat samples of up to 6 inches in diameter.

  • Tool Owner

4Wave The Laboratory Alloy and Nanolayer System (LANS) (UWA)

Biased target ion beam deposition system

WA

WA

  • Description
  • Related Information
  • Tool Owner
  • Description

    Provides atomically engineered thin films and interfaces.

    The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability.

  • Related Information

    Typical deposited materials: Fe, Pd, Ce, Nb, Ga, Al, Si, and certain other materials upon request.

  • Tool Owner

Can't find what you're looking for?

This website is under development at the moment, and not everything has been uploaded yet. If you can't find something you're looking for, it doesn't mean we don't have it – get in touch to see if we can help.

Contact Us