Spectroscopic ellipsometry

Testing and validation > Thin Film Characterisation

Description

Spectroscopic ellipsometry is an optical characterisation technique which provides a highly sensitive, contactless method for thin film measurements.

Multiple light wavelengths and variable angles of polarised light are reflected off the surface of a sample. As this light reflects, its characteristics...

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List of Available Tools

Tool Make and Model

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J. A. Woollam M-2000-DI (ANU)

Spectral Ellipsometer

ACT

ACT

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  • Description

    Fully automated spectral ellipsometer to measure refractive index and thickness of materials.

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    Spectral Range of 193 to 1,700 nm.

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J.A. Woollam IR-VASE (UoA)

Measuring complex refractive index or dielectric function of thin films.

Optofab

Optofab

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    Common measurements include coating thickness, IR refractive indices and molecular bond vibrations.

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    Specification: 1.7 to 30 μm (333 to 5900 wavenumbers)

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J. A. Woollam VUV VASE (Gen-II) (UQ)

Variable angle spectroscopic ellipsometer

QLD

QLD

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    Versatile, easy to use ellipsometer for measurement of optical properties, film thickness and refractive index.

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    Sample substrates up to 50 mm.

    Spectral range of 140 – 1700 nm.

    Incident angle between 40 – 90° using XY stage.

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