Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Yield Engineering Systems (YES) 310TA (Griffith)
HDMS oven
QLD
QLD
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Description
A HMDS vapour is heated to 150°C in a vacuum chamber and modifies the surface of the substrate in a controlled and reproducible manner.
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Related Information
Used to promote adhesion of photoresist to standard semiconductor substrates.
Priming is effective for approximately 3 weeks.
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Tool Owner