Silanisation

Materials Synthesis and Modification > Surface treatment

Description

The alteration of the surface chemistry of a substrate using an organofunctional alkoxysilane to make a sample hydrophobic.

The process works on mineral components such as glass and metal oxides as they have hydroxyl groups which attach to and displace the alkoxy groups on the silane forming a covalent...

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Yield Engineering Systems (YES) 310TA (Griffith)

HDMS oven

QLD

QLD

  • Description
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  • Description

    A HMDS vapour is heated to 150°C in a vacuum chamber and modifies the surface of the substrate in a controlled and reproducible manner.

  • Related Information

    Used to promote adhesion of photoresist to standard semiconductor substrates.

    Priming is effective for approximately 3 weeks.

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