Scanning Electron Microscopy (SEM)
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Scanning Electron Microscopy (SEM)

Scanning Electron Microscopy (SEM) is the process whereby a tightly focused electron beam is scanned onto the surface to be imaged. As the primary electrons hit the atoms in the surface, a number of secondary electrons are emitted, and collected by the instrument’s detector, which assigns a level of grey accordingly, thereby creating a pixel for a digital image. The machines can routinely image features down to about 10nm, and in some special cases down to several nm in size.SEM is a key tool for process characterisation of surface topography. Most samples fabricated in the cleanroom undergoes at least one round of SEM imaging, in order to assess the quality of the fabrication and its defects. This information is fed into the process optimisation loop until a satisfying sample is produced. The tool is also used to image samples such as fixated cells and failed components.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ASPEX PSEM eXpress
Desktop Scanning Electron Microscope (SEM)
SA Node University of South Australia
Description
A simple to operate SEM with an intuitive user interface. No special sample preparation required, it operates in both low and high vacuum modes and has four settings for accelerating voltage. Suitable for a variety of applications depending upon material.Features a large stage allows travel of up to 80 mm x 120 mm and a magnification of up to 40,000 times is possible.
Related Information
This tool is commonly used for imaging of nanofabricated feature geometries such as microfluidic channels for process control, quality assurance and product validation.
Tool Contact
Simon.Doe@unisa.edu.au
Benchtop Scanning electron microscope
Desktop Scanning Electron Microscope (SEM)
SA Node University of South Australia
Description
A simple to operate SEM with an intuitive user interface. No special sample preparation required, it operates in both low and high vacuum modes and has four settings for accelerating voltage. Suitable for a variety of applications depending upon material.Features a large stage allows travel of up to 80 mm x 120 mm and a magnification of up to 40,000 times is possible.
Related Information
This tool is commonly used for imaging of nanofabricated feature geometries such as microfluidic channels for process control, quality assurance and product validation.
Tool Contact
Simon.Doe@unisa.edu.au
Custom Preparation suite
SEM coater, vacuum oven, spinners, wire bonder
ACT Node Australian National University (ANU)
Description
Coating samples for SEM, vacuum oven to avoid curing polymers in air
Related Information
Various preparation equipment for samples up to 8 inches
Tool Contact
horst.punzmann@anu.edu.au
FEI NovaNanoSEM 430
Field Emission Gun Scanning Electron Microscope (FEG-SEM)
Melbourne Centre for Nanofabrication VIC Node
Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and metrology purposes in order to assess the quality of fabrication of devices and any defects.
Related Information
Ultra-high resolution imaging of samples of all sizes up to 6 inch wafers. The 5-axis stage and 100mm stage movement add flexibility to this equipment. Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface.
Tool Contact
mcn-enquiries@nanomelbourne.com
FEI Verios SEM-CL
Cathodoluminescence Analysis and Scanning Electron Microscopy (SEM-CL)
ACT Node Australian National University (ANU)
Description
The FEI Verios 460L has a field emission gun and a monochromator suitable for ultra high resolution imaging. Attached to the instrument are a Gatan MonoCL4 Elite system which enables cathodoluminescence mapping and spectroscopic studies, and an Oxford electron dispersive X-ray (EDX) spectrometer for elemental analysis.
Related Information
The FEI Verios has a resolution of < 1 nm. The CL system can detect light from the UV to NIR range (200 nm - 2,000 nm) and CL can be performed at both room and low temperatures.
Tool Contact
horst.punzmann@anu.edu.au
Hitachi TM3030
Desktop Scanning Electron Microscope (SEM)
Macquarie University Optofab Node
Description
Benchtop SEM with Qantax EDS. Practical inspection and EDS up to 2000x mag.
Related Information
Accommodates samples up to 50mm, quality imaging to ~2000X magnification
Tool Contact
benjamin.johnston@mq.edu.au
Jeol IT-300
Scanning Electron Microscopy (SEM)
QLD Node University of Queensland
Description
Tungsten filament SEM used to image samples up to 6 inches in diameter with a resolution of 3 nm at 30kV.
Related Information
Jeol platinum sputtering system available. All sample can be used once they are fixed on a substrate and do not outgas. Located in cleanroom to support cleanroom fabrication processes.
Tool Contact
anff@uq.edu.au
Jeol JSM 7100F
Field Emission Scanning Electron Microscope (FE-SEM)
Macquarie University Optofab Node
Description
FESEM with cancellation cage and Kliendieck mounting plate available
Related Information
More information to come.
Tool Contact
benjamin.johnston@mq.edu.au
Jeol NeoSCOPE
Desktop Scanning Electron Microscope (SEM)
QLD Node University of Queensland
Description
Desktop SEM used to image small conductive samples, up to 70 mm in diameter.
Related Information
Capable of imaging most materials with a conductive layer. Magnification 10x - 40000x. Sample size 70 mm diameter, 4 inch wafer. Acceleration voltage of 15 kV, 10 kV and 5 kV.
Tool Contact
anff@uq.edu.au
Kleindieck MM3A
Micro Manipulators
Macquarie University Optofab Node
Description
Micro Manipulators
Related Information
3D control over a sample during SEM activities.
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ASPEX PSEM eXpress
Desktop Scanning Electron Microscope (SEM)
Macquarie University Optofab Node
Description
A simple to operate SEM with an intuitive user interface. No special sample preparation required, it operates in both low and high vacuum modes and has four settings for accelerating voltage. Suitable for a variety of applications depending upon material.Features a large stage allows travel of up to 80 mm x 120 mm and a magnification of up to 40,000 times is possible.
Related Information
This tool is commonly used for imaging of nanofabricated feature geometries such as microfluidic channels for process control, quality assurance and product validation.
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Benchtop Scanning electron microscope
Desktop Scanning Electron Microscope (SEM)
Macquarie University Optofab Node
Description
A simple to operate SEM with an intuitive user interface. No special sample preparation required, it operates in both low and high vacuum modes and has four settings for accelerating voltage. Suitable for a variety of applications depending upon material.Features a large stage allows travel of up to 80 mm x 120 mm and a magnification of up to 40,000 times is possible.
Related Information
This tool is commonly used for imaging of nanofabricated feature geometries such as microfluidic channels for process control, quality assurance and product validation.
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Preparation suite
SEM coater, vacuum oven, spinners, wire bonder
Macquarie University Optofab Node
Description
Coating samples for SEM, vacuum oven to avoid curing polymers in air
Related Information
Various preparation equipment for samples up to 8 inches
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
FEI NovaNanoSEM 430
Field Emission Gun Scanning Electron Microscope (FEG-SEM)
Macquarie University Optofab Node
Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and metrology purposes in order to assess the quality of fabrication of devices and any defects.
Related Information
Ultra-high resolution imaging of samples of all sizes up to 6 inch wafers. The 5-axis stage and 100mm stage movement add flexibility to this equipment. Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
FEI Verios SEM-CL
Cathodoluminescence Analysis and Scanning Electron Microscopy (SEM-CL)
Macquarie University Optofab Node
Description
The FEI Verios 460L has a field emission gun and a monochromator suitable for ultra high resolution imaging. Attached to the instrument are a Gatan MonoCL4 Elite system which enables cathodoluminescence mapping and spectroscopic studies, and an Oxford electron dispersive X-ray (EDX) spectrometer for elemental analysis.
Related Information
The FEI Verios has a resolution of < 1 nm. The CL system can detect light from the UV to NIR range (200 nm - 2,000 nm) and CL can be performed at both room and low temperatures.
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Hitachi TM3030
Desktop Scanning Electron Microscope (SEM)
Macquarie University Optofab Node
Description
Benchtop SEM with Qantax EDS. Practical inspection and EDS up to 2000x mag.
Related Information
Accommodates samples up to 50mm, quality imaging to ~2000X magnification
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Jeol IT-300
Scanning Electron Microscopy (SEM)
Macquarie University Optofab Node
Description
Tungsten filament SEM used to image samples up to 6 inches in diameter with a resolution of 3 nm at 30kV.
Related Information
Jeol platinum sputtering system available. All sample can be used once they are fixed on a substrate and do not outgas. Located in cleanroom to support cleanroom fabrication processes.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Jeol JSM 7100F
Field Emission Scanning Electron Microscope (FE-SEM)
Macquarie University Optofab Node
Description
FESEM with cancellation cage and Kliendieck mounting plate available
Related Information
More information to come.
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Jeol NeoSCOPE
Desktop Scanning Electron Microscope (SEM)
Macquarie University Optofab Node
Description
Desktop SEM used to image small conductive samples, up to 70 mm in diameter.
Related Information
Capable of imaging most materials with a conductive layer. Magnification 10x - 40000x. Sample size 70 mm diameter, 4 inch wafer. Acceleration voltage of 15 kV, 10 kV and 5 kV.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Kleindieck MM3A
Micro Manipulators
Macquarie University Optofab Node
Description
Micro Manipulators
Related Information
3D control over a sample during SEM activities.
Tool Contact
benjamin.johnston@mq.edu.au