Scanning Electron Microscopy (SEM)

Testing and validation > Scanning Electron Microscopy (SEM)

Description

Scanning Electron Microscopy (SEM) is the process whereby a tightly focused electron beam is scanned onto the surface to be imaged. As the primary electrons hit the atoms in the surface, a number of secondary electrons are emitted, and collected by the instrument’s detector, which assigns a level of...

Key Applications

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List of Available Tools

Tool Make and Model

Key Differentiator

Node

Custom Preparation suite (ANU)

SEM coater, vacuum oven, spinners, wire bonder

ACT

ACT

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  • Description

    Coating samples for SEM, vacuum oven to avoid curing polymers in air

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    Various preparation equipment for samples up to 8 inches

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FEI Verios SEM-CL (ANU)

Cathodoluminescence Analysis and Scanning Electron Microscopy (SEM-CL)

ACT

ACT

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  • Description

    The FEI Verios 460L has a field emission gun and a monochromator suitable for ultra high resolution imaging. Attached to the instrument are a Gatan MonoCL4 Elite system which enables cathodoluminescence mapping and spectroscopic studies, and an Oxford electron dispersive X-ray (EDX) spectrometer for elemental analysis.

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    The FEI Verios has a resolution of < 1 nm. The CL system can detect light from the UV to NIR range (200 nm - 2,000 nm) and CL can be performed at both room and low temperatures.

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Hitachi TM3030 (MQ)

Desktop Scanning Electron Microscope (SEM)

Optofab

Optofab

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    Benchtop SEM with Qantax EDS. Practical inspection and EDS up to 2000x mag.

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    Accommodates samples up to 50mm, quality imaging to ~2000X magnification

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Jeol JSM 7100F (MQ)

Field Emission Scanning Electron Microscope (FE-SEM)

Optofab

Optofab

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    FESEM with cancellation cage and Kliendieck mounting plate available

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Kleindieck MM3A (MQ)

Micro Manipulators

Optofab

Optofab

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  • Description

    Micro Manipulators

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    3D control over a sample during SEM activities.

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Jeol NeoSCOPE (UQ)

Desktop Scanning Electron Microscope (SEM)

QLD

QLD

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  • Description

    Desktop SEM used to image small conductive samples, up to 70 mm in diameter.

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    Capable of imaging most materials with a conductive layer. Magnification 10x – 40000x.

    Sample size 70 mm diameter, 4 inch wafer.

    Acceleration voltage of 15 kV, 10 kV and 5 kV. 

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Jeol IT-300 (UQ)

Scanning Electron Microscopy (SEM)

QLD

QLD

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  • Description

    Tungsten filament SEM used to image samples up to 6 inches in diameter with a resolution of 3 nm at 30kV.

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    Jeol platinum sputtering system available.

    All sample can be used once they are fixed on a substrate and do not outgas.

    Located in cleanroom to support cleanroom fabrication processes.  

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ASPEX PSEM eXpress (UniSA)

Desktop Scanning Electron Microscope (SEM)

SA

SA

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  • Description

    A simple to operate SEM with an intuitive user interface. No special sample preparation required, it operates in both low and high vacuum modes and has four settings for accelerating voltage. Suitable for a variety of applications depending upon material.

    Features a large stage allows travel of up to 80 mm x 120 mm and a magnification of up to 40,000 times is possible.

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    This tool is commonly used for imaging of nanofabricated feature geometries such as microfluidic channels for process control, quality assurance and product validation.

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FEI NovaNanoSEM 430  (MCN)

Field Emission Gun Scanning Electron Microscope (FEG-SEM)

VIC

VIC

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  • Description

    Ultra-high resolution three dimensional imaging for topography, surface morphology and metrology purposes in order to assess the quality of fabrication of devices and any defects.

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    Ultra-high resolution imaging of samples of all sizes up to 6 inch wafers.

    The 5-axis stage and 100mm stage movement add flexibility to this equipment.

    Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface.

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