Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Custom Preparation suite (ANU)
SEM coater, vacuum oven, spinners, wire bonder
ACT
ACT
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Description
Coating samples for SEM, vacuum oven to avoid curing polymers in air
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Related Information
Various preparation equipment for samples up to 8 inches
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Tool Owner
FEI Verios SEM-CL (ANU)
Cathodoluminescence Analysis and Scanning Electron Microscopy (SEM-CL)
ACT
ACT
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Description
The FEI Verios 460L has a field emission gun and a monochromator suitable for ultra high resolution imaging. Attached to the instrument are a Gatan MonoCL4 Elite system which enables cathodoluminescence mapping and spectroscopic studies, and an Oxford electron dispersive X-ray (EDX) spectrometer for elemental analysis.
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Related Information
The FEI Verios has a resolution of < 1 nm. The CL system can detect light from the UV to NIR range (200 nm - 2,000 nm) and CL can be performed at both room and low temperatures.
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Tool Owner
Hitachi TM3030 (MQ)
Desktop Scanning Electron Microscope (SEM)
Optofab
Optofab
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Description
Benchtop SEM with Qantax EDS. Practical inspection and EDS up to 2000x mag.
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Related Information
Accommodates samples up to 50mm, quality imaging to ~2000X magnification
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Tool Owner
Jeol JSM 7100F (MQ)
Field Emission Scanning Electron Microscope (FE-SEM)
Optofab
Optofab
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Description
FESEM with cancellation cage and Kliendieck mounting plate available
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Related Information
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Tool Owner
Kleindieck MM3A (MQ)
Micro Manipulators
Optofab
Optofab
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Description
Micro Manipulators
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Related Information
3D control over a sample during SEM activities.
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Tool Owner
Jeol NeoSCOPE (UQ)
Desktop Scanning Electron Microscope (SEM)
QLD
QLD
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Description
Desktop SEM used to image small conductive samples, up to 70 mm in diameter.
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Related Information
Capable of imaging most materials with a conductive layer. Magnification 10x – 40000x.
Sample size 70 mm diameter, 4 inch wafer.
Acceleration voltage of 15 kV, 10 kV and 5 kV.
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Tool Owner
Jeol IT-300 (UQ)
Scanning Electron Microscopy (SEM)
QLD
QLD
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Description
Tungsten filament SEM used to image samples up to 6 inches in diameter with a resolution of 3 nm at 30kV.
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Related Information
Jeol platinum sputtering system available.
All sample can be used once they are fixed on a substrate and do not outgas.
Located in cleanroom to support cleanroom fabrication processes.
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Tool Owner
ASPEX PSEM eXpress (UniSA)
Desktop Scanning Electron Microscope (SEM)
SA
SA
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Description
A simple to operate SEM with an intuitive user interface. No special sample preparation required, it operates in both low and high vacuum modes and has four settings for accelerating voltage. Suitable for a variety of applications depending upon material.
Features a large stage allows travel of up to 80 mm x 120 mm and a magnification of up to 40,000 times is possible.
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Related Information
This tool is commonly used for imaging of nanofabricated feature geometries such as microfluidic channels for process control, quality assurance and product validation.
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Tool Owner
FEI NovaNanoSEM 430 (MCN)
Field Emission Gun Scanning Electron Microscope (FEG-SEM)
VIC
VIC
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Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and metrology purposes in order to assess the quality of fabrication of devices and any defects.
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Related Information
Ultra-high resolution imaging of samples of all sizes up to 6 inch wafers.
The 5-axis stage and 100mm stage movement add flexibility to this equipment.
Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface.
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Tool Owner
