Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
SCI FilmTek 2000M (UQ)
Benchtop spectroscopic reflectometer
QLD
QLD
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Description
Provides quick and simple measurements of film thickness, index of refraction and extinction coefficient using reflected and absorbed white light when analysing transparent or semi-transparent thin films.
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Related Information
Spot size of 2 – 50 µm.
Sample size up to 6 inch wafer.
Film thickness range of 3 nm to 350 µm.
Spectral range of 240 to 950 nm.
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Tool Owner