Testing and validation > Thin Film Characterisation


Reflectometry is the characterisation of a surface or interface using the information gathered by the reflected wave of a generated signal. The signal can be light, sound, or particles.

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SCI FilmTek 2000M (UQ)

Benchtop spectroscopic reflectometer



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  • Description

    Provides quick and simple measurements of film thickness, index of refraction and extinction coefficient using reflected and absorbed white light when analysing transparent or semi-transparent thin films.

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    Spot size of 2 – 50 µm.

    Sample size up to 6 inch wafer.

    Film thickness range of 3 nm to 350 µm.

    Spectral range of 240 to 950 nm. 

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