Capabilities

Reflectometry

Testing and validation > Thin Film Characterisation

Description

Reflectometry is the characterisation of a surface or interface using the information gathered by the reflected wave of a generated signal. The signal can be light, sound, or particles.

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List of Available Tools

Tool Make and Model

Key Differentiator

Node

SCI FilmTek 2000M (UQ)

Benchtop spectroscopic reflectometer

QLD

Description
Related Information
Tool Owner

Description

Provides quick and simple measurements of film thickness, index of refraction and extinction coefficient using reflected and absorbed white light when analysing transparent or semi-transparent thin films.
Related Information

Spot size of 2 – 50 µm.

Sample size up to 6 inch wafer.

Film thickness range of 3 nm to 350 µm.

Spectral range of 240 to 950 nm.
Tool Owner

Doug Mair @ UQ

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