Materials Synthesis and Modification > Material synthesis
Reactors provide controllable environments in which to produce new materials.
List of Available Tools
Tool Make and Model
Uniqsis FlowSyn (UoW)
Flow reactor for continuous flow reactions
Custom SPT Micro EpiFlx (Griffith)
Large batch production reactor for SiC Deposition
Global standard for thin epitaxial thin films of SiC. Can process wafers of up to 300mm Si wafers with a uniformity of sub-1%.
Production reactor for the deposition of SiC on Si for MEMs, photonic and mechanical exploitation of SiC.