Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Uniqsis FlowSyn (UoW)
Flow reactor for continuous flow reactions
Materials Node
Materials Node
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Description
Continuous flow reactor for organic synthesis
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Related Information
Used to synthesise organic materials
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Tool Owner
Custom SPT Micro EpiFlx (Griffith)
Large batch production reactor for SiC Deposition
QLD
QLD
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Description
Global standard for thin epitaxial thin films of SiC. Can process wafers of up to 300mm Si wafers with a uniformity of sub-1%.
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Related Information
Production reactor for the deposition of SiC on Si for MEMs, photonic and mechanical exploitation of SiC.
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Tool Owner
