Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
South Bay RIE3000 (USYD)
O2 Plasma Asher/RIE
NSW
NSW
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Description
Reactive ion etch system dedicated to O2 and Ar plasma processes
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Related Information
Used primarily for resist and sample cleaning.
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Tool Owner
LAM Autoetch 480 (Griffith)
Plasma Asher
QLD
QLD
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Description
Plasma etching of 6 inch wafers using a semi-isotropic dry etch process.
Can produce features of 3µm.
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Related Information
Utilises SF6 and O. Used to etch SiC, SiN and SiO2 and polymer resists.
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Tool Owner
