Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
KLA Zeta 300 (UQ)
Optical profilometer
QLD
QLD
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Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
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Related Information
Measures multilayer film thickness, surface roughness and step heights, CD measurement and 3D profiling.
Automated metrology and data analysis.
Substrate size up to 6 inch wafer and 100 mm thick.
Z resolution of 1 nm.
Lateral resolution >370 nm at 150x.
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Tool Owner
Veeco Wyko NT1100 (UQ)
Optical profilometer
QLD
QLD
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Description
For optical 3D profiling of samples and surface roughness measurements of most materials. Uses an interference technique to construct 3D images of nanofabricated structures
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Related Information
Substrates with a scan area of 2 x 2.5 mm.
White light interferometer for vertical measurement range of 0.1 nm to 2 mm with a vertical resolution 1 < 1 Å.
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Tool Owner
Veeco Wyko NT9100 (UniSA)
Optical profilometer
SA
SA
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Description
Provides 3D imaging of channel geometries for process control quality assurance and product validation. Capable of taking sub-nanometre to millimetre-high steps in the z dimension.
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Related Information
Coherence scanning interferometry provides fast, accurate and repeatable output. It is used to measure step heights, roughness and surface topography of components.
Capable of analysing many materials and components including a range of metals, MEMS, semiconductors and optics.
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Tool Owner
Zygo NewView6300 (UWA)
Optical profilometer
WA
WA
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Description
Non-contact 3D scanning white light and optical phase-shifting interferometer.
Featured modes: Microscope, Films, Stitch and Dynamic MEMS.
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Related Information
Vertical resolution up to 0.1 nm. Field of view from 0.04 to 14 mm.
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Tool Owner
