Optical profilometry

Testing and validation > Profilometry

Description

Optical profilometry is a non-contact form of profilometry that can be used to characterise the surface steps and the roughness of a material.

Optical profilometry employs phase-shifting and/or vertical scanning interferometry to resolve the topology of complex 3D structures. The technique marries...

Key Applications

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List of Available Tools

Tool Make and Model

Key Differentiator

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KLA Zeta 300 (UQ)

Optical profilometer

QLD

QLD

  • Description
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  • Tool Owner
  • Description

    System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.

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    Measures multilayer film thickness, surface roughness and step heights, CD measurement and 3D profiling.

    Automated metrology and data analysis.

    Substrate size up to 6 inch wafer and 100 mm thick.

    Z resolution of 1 nm.

    Lateral resolution >370 nm at 150x.

  • Tool Owner

Veeco Wyko NT1100 (UQ)

Optical profilometer

QLD

QLD

  • Description
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  • Tool Owner
  • Description

    For optical 3D profiling of samples and surface roughness measurements of most materials. Uses an interference technique to construct 3D images of nanofabricated structures

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    Substrates with a scan area of 2 x 2.5 mm.

    White light interferometer for vertical measurement range of 0.1 nm to 2 mm with a vertical resolution 1 < 1 Å.

  • Tool Owner

Veeco Wyko NT9100 (UniSA)

Optical profilometer

SA

SA

  • Description
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  • Description

    Provides 3D imaging of channel geometries for process control quality assurance and product validation. Capable of taking sub-nanometre to millimetre-high steps in the z dimension.

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    Coherence scanning interferometry provides fast, accurate and repeatable output. It is used to measure step heights, roughness and surface topography of components.

    Capable of analysing many materials and components including a range of metals, MEMS, semiconductors and optics.

  • Tool Owner

Zygo NewView6300 (UWA)

Optical profilometer

WA

WA

  • Description
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  • Tool Owner
  • Description

    Non-contact 3D scanning white light and optical phase-shifting interferometer.

    Featured modes: Microscope, Films, Stitch and Dynamic MEMS.

  • Related Information

    Vertical resolution up to 0.1 nm. Field of view from 0.04 to 14 mm.

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