Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Seki AX6300 (MQ)
MPCVD system for deposition of diamond
Optofab
Optofab
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Description
CVD reactor for growing polydiamond films from methane/hydrogen chemistries.
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Related Information
2 inch sample stage
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Tool Owner
Seki AX6300 (MCN)
MPCVD system for deposition of boron-doped diamond
VIC
VIC
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Description
Used to coat seeded samples of any shape with boron-doped diamond.
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Related Information
Deposits at approximately 1 µm/h.
Maximum sample size is 2 inches.
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Tool Owner