Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Seki AX6300 (MQ)
MPCVD system for deposition of diamond
Optofab
Optofab
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Description
CVD reactor for growing polydiamond films from methane/hydrogen chemistries.
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Related Information
2 inch sample stage
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Tool Owner
Seki AX6300 (MCN)
MPCVD system for deposition of boron-doped diamond
VIC
VIC
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Description
Used to coat seeded samples of any shape with boron-doped diamond.
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Related Information
Deposits at approximately 1 µm/h.
Maximum sample size is 2 inches.
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Tool Owner
Seki SDS 5010-INT (UTS)
MPCVD system for deposition of doped diamond
Optofab
Optofab
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Description
The SEKI diamond CVD, located in the Vacuum lab facility, utilises a microwave plasma to assist the chemical vapour deposition of diamond, This growth of diamond can be doped to incorporate optically active colourcentres, such as the group IV colourcentres. The SEKI operates by initially generating a dense hydrogen plasma, which can also be employed to hydrogen terminate samples without deposition of diamond. This capability can therefore be used to activate a range of materials in pursuit of a range of project roles, both diamond and surface termination focused.
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Related Information
Possible doped films include Nitrogen, Boron, Germanium, Nickel etc.
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Tool Owner
