Capabilities

Maskless lithography

Lithography > Photolithography

Description

Maskless lithography can be used to speed up the lithography process, and to save money by negating the need to fabricate steps required. Micropatterning is a lithography process that involves an image being projected directly onto a photoresist without the use of a mask.

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List of Available Tools

Tool Make and Model

Key Differentiator

Node

Intelligent Micropatterning SF100 XPRESS (MCN)

Maskless micropatterning system

VIC

Description
Related Information
Tool Owner

Description

A maskless photolithography system capable of writing features down to 1 μm, that offers speed and cost benefits over masked systems.
Related Information

A wide range of materials can be processed, and provides great control in writing and aligning fine features on smaller substrates. The process us non-contact, which reduces risk of damaged samples.

Commonly used to quickly and accurately create photomasks.
Tool Owner

John Paul Teodosio @ MCN

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