Furnaces

Materials Synthesis and Modification > Material modification

Description

High temperature furnaces used to melt materials to create glass fibre fabrication.

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List of Available Tools

Tool Make and Model

Key Differentiator

Node

Barrell Melt extrusion pot (UoW)

Polymer melting pot

Materials Node

Materials Node

  • Description
  • Related Information
  • Tool Owner
  • Description

    Pneumatic melt pot extruder

  • Related Information

    250g max

  • Tool Owner

Custom Glass melter (UoA)

Controlled atmosphere oxide glass melting facilities.

Optofab

Optofab

  • Description
  • Related Information
  • Tool Owner
  • Description

    Facility consisting of a 6-port glovebox with integrated furnaces

  • Related Information

    Consists of one 900 degree C melting furnace, and three 500 C degree annealing furnaces.

  • Tool Owner

Hitech CTF/150/3Z/1200C (UQ)

Oxidation Furnace

QLD

QLD

  • Description
  • Related Information
  • Tool Owner
  • Description

    Dry thermal oxidation produces high integrity oxides compared to sputtered, evaporated or PECVD films. Dry thermal oxidation of silicon to create SiO2 films up to 300 nm thick. The temperature and gas flow are tightly controlled.

  • Related Information

    Silicon is heated to more than 1,000°C in an oxygen rich environment. Highly customisable gas flow and temperature profiles.

    Sample size of up to 6″ wafers.

    Up to 25 wafers per run.

    Maximum temperature of 1200°C.

  • Tool Owner

Hitech CTF/150/3Z/1200C (MCN)

Wet/dry oxidation furnace

VIC

VIC

  • Description
  • Related Information
  • Tool Owner
  • Description

    Allows for the wet or dry oxidation of up to 25 wafers in one run. SiO2 growth up to 4µm possible via wet oxidation.

  • Related Information

    Silicon is heated to more than 1,000°C in an oxygen rich environment. Highly customisable gas flow and temperature profiles.

    Sample size of up to 6″ wafers.

    Up to 25 wafers per run.

    Maximum temperature of 1200°C.

  • Tool Owner

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