Furnaces

Materials Synthesis and Modification > Material modification

Description

High temperature furnaces used to melt materials to create glass fibre fabrication.

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List of Available Tools

Tool Make and Model

Key Differentiator

Node

Barrell Melt extrusion pot (UoW)

Polymer melting pot

Materials Node

Materials Node

  • Description
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  • Tool Owner
  • Description

    Pneumatic melt pot extruder

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    250g max

  • Tool Owner

Custom Glass melter (UoA)

Controlled atmosphere oxide glass melting facilities.

Optofab

Optofab

  • Description
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  • Tool Owner
  • Description

    Facility consisting of a 6-port glovebox with integrated furnaces

  • Related Information

    Consists of one 900 degree C melting furnace, and three 500 C degree annealing furnaces.

  • Tool Owner

Hitech CTF/150/3Z/1200C (UQ)

Oxidation Furnace

QLD

QLD

  • Description
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  • Tool Owner
  • Description

    Dry thermal oxidation produces high integrity oxides compared to sputtered, evaporated or PECVD films. Dry thermal oxidation of silicon to create SiO2 films up to 300 nm thick. The temperature and gas flow are tightly controlled.

  • Related Information

    Silicon is heated to more than 1,000°C in an oxygen rich environment. Highly customisable gas flow and temperature profiles.

    Sample size of up to 6″ wafers.

    Up to 25 wafers per run.

    Maximum temperature of 1200°C.

  • Tool Owner

Hitech CTF/150/3Z/1200C (MCN)

Wet/dry oxidation furnace

VIC

VIC

  • Description
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  • Tool Owner
  • Description

    Allows for the wet or dry oxidation of up to 25 wafers in one run. SiO2 growth up to 4µm possible via wet oxidation.

  • Related Information

    Silicon is heated to more than 1,000°C in an oxygen rich environment. Highly customisable gas flow and temperature profiles.

    Sample size of up to 6″ wafers.

    Up to 25 wafers per run.

    Maximum temperature of 1200°C.

  • Tool Owner

LABEC 1500 (UTS)

Ceramic tube furnace for 1,500° exposure

Optofab

Optofab

  • Description
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  • Tool Owner
  • Description

    Two tube furnaces are available at UTS optohub, The Labec 1500, and the STF1200, both found in the Vacuum lab facilities. The labec 1500 is a ceramic furnace, capable of achieving temperatures up to 1500 degrees, above what is generally achievable by quartz based furnaces, allowing for annealing and CVD at higher temperatures over sustained periods in vacuum controlled environments.

  • Related Information

    Temperature range scaling up to 1500C, vacuum compatible, access to inert gas lines including nitrogen/argon environment. Rate of rise of 5C/minute. Ceramic tubes required for high tempreature experiments

  • Tool Owner

STF 1200 (UTS)

Tube furnace for HBN Overgrowth

Optofab

Optofab

  • Description
  • Related Information
  • Tool Owner
  • Description

    Two tube furnaces are available at UTS optohub, The Labec 1500, and the STF1200, both found in the Vacuum lab facilities.
    The STF 1200 is a purpose built Tube furnace setup for the generation of optically active hBN samples. Samples of this product are available, however this tube furnace is reserved for hBN growth exclusively. Samples available upon request.

  • Related Information

    Temperature range scaling up to 1200C, vacuum compatible, access to inert gas lines including nitrogen/argon environment. Priority access to hBN growth

  • Tool Owner

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