Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Fumehoods Process specific (UQ)
Fumehoods for lithography processes
QLD
QLD
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Description
This recirculating fume cupboard houses a spin coater, a hot plate, and a development station which are used for processing AZ photoresists.
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Related Information
Standard equipment for photolithography, such as spin coating AZ photoresists onto various substrates.
Can be used to support a range of applications including MEMS, photonics, microfluidics, micropatterning, optics, electronics etc
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Tool Owner
Fumehoods Biological Safety Cabinets (MCN)
Topsafe Class II
VIC
VIC
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Description
A recirculating fume cupboard with a spin coater and a hot plate.
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Related Information
Standard equipment for photolithography, using a wide range of photoresists (AZ, SU8, PPA, PMMA) and various substrates.
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Tool Owner
