Capabilities
List of Available Tools
Tool Make and Model
Key Differentiator
Node
Temescal BJD2000 (ANU)
Electron beam evaporator for depositing metals including Au, Pt, Ti, Al, Cr, Ge, Ni, Mo, Nb
ACT
ACT
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Description
Equipment provides E-beam evaporation of metals and also features a thermal evaporation source for gold.
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Related Information
Features an electron gun and up to six crucibles.
Materials: Au, Pt, Ag, Ti, Cr, Al, Ge, Ni, Mo
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Tool Owner
Temescal Systems FC-2000 (UQ)
Electron beam evaporator
QLD
QLD
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Description
Can perform thermal and e-beam evaporation on multiple wafers at the same time. Features six source pockets for multiple layer coatings.
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Related Information
Available evaporation materials are: Al, Ni, Cr, Ag, Au, Ti, Cu, NiO, TiO2, MoO3, Al2O3 and ITO alongside 2 reactive gases.
Features a Load Lock.
Can hold up to 13 x 4 inch wafers.
Substrate heater up to 300°C.
E-gun power is 10kV
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Tool Owner
Intlvac Nanochrome II (MCN)
Electron beam evaporator
VIC
VIC
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Description
Single films or multi-material stacks are easily created using simple layer definitions.
Features ion-beam pre-cleaning and sample heating capabilities.
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Related Information
Features a 10kV power supply and supports up to sixteen 4 inch wafers or fifteen 6 inch wafers or wafer mounted samples.
Coating thickness are from 2nm up to 200nm (thickness >200nm by approval).
Currently available in the materials library are metals (Al, Cr, Ti, Au, Ag), oxides (SiO2, TiO2, Al2O3, ITO), fluorides (MgF2) and semiconductors (Si, Ge).
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Tool Owner
Edwards Auto 500 (UWA)
Electron beam evaporator
WA
WA
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Description
Ability to deposit ultra pure films of materials with high melting points, and other materials that are difficult to deposit by resistance evaporation. The tool allows thick film deposition and also multiple coatings.
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Related Information
Materials: Au, Ti, Ge, Pt, Ni, Al, and certain other materials upon request.
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Tool Owner
Scientific Vacuum Systems V6000 (UWA)
Electron beam evaporator
WA
WA
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Description
Confocal sputtering systems for creating research mirrors. Featuring the same quality of design and components the V6000 research coaters are ideal for single wafer processing.
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Related Information
Up to 6-inch diameter confocal sputter magnetron target options. Materials: Ti, Au, and certain other materials upon request.
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Tool Owner
