ANFF NSW

Contact

Node Director: Prof. Andrew Dzurak
Email: a.dzurak@unsw.edu.au
Phone: +61 2 9385 6311

Facility Manager: Matthew Boreland
Email: m.boreland@unsw.edu.au
Phone: +61 2 9385 7845

Visit the website

Overview

The NSW Node of ANFF is split between the University of New South Wales (UNSW) and the University of Sydney.

The core area of expertise for ANFF’s activities at UNSW includes nanoelectronics, with both Si-MOS and GaAs devices with sub-50 nm feature sizes routinely produced using the hub’s suite of high-resolution EBL systems within a 600 m2 laboratory complex providing cleanrooms with particle counts equivalent to ISO5, ISO6 and ISO7. The full range of research disciplines regularly supported by ANFF NSW @ UNSW is broad, encompassing quantum computing, biomedical devices, nanophotonics, medical detectors and photovoltaics.

ANFF NSW equipment at the University of Sydney forms part of the Research and Prototype Foundry (RFP), a Core Research Facility based at the Sydney Nanoscience Hub. The RFP enables the development of optical chips, electronic devices and new quantum science and technology via outstanding lithography, etching, deposition and metrology capabilities.

Node Competencies

Specialist fields: nanoelectronics (Si-MOS and GaAs); semiconductor device processing; optics; quantum technologies; photovoltaics.

Flagship facilities: high resolution EBL systems, including the flagship Raith 150TWO; UV lithography equipment; a range of deposition systems and etching tools; high temperature silicon oxidation, diffusion and annealing furnaces; wet chemical process lines; a suite of metrology tools; device packaging and bonding tools.

Locations

University of New South Wales

Address

Level 3 Newton Building
The University of New South Wales
Sydney NSW 2052

 

University of Sydney

Address

Sydney Nanoscience Hub
University of Sydney
NSW 2052

+61 2 9036 9050

Prof. Andrew Dzurak

Node Director
UNSW

Prof. Andrew Dzurak is the founding director of the ANFF NSW node and a Scientia Professor of Nanoelectronics in the School of Electrical Engineering and Telecommunications at UNSW.

Area of Expertise:

One of Australia’s leading experts in nanoelectronics and quantum computing technologies

Prof. Simon Fleming

Deputy Director
USyd

Simon is Deputy Director of the ANFF NSW Node and the Academic Director of the University of Sydney facility.

Area of Expertise:

Fibre Fabrication

Matthew Boreland

Facility Business Manager
UNSW

Matt joined ANFF in 2017 as the NSW Facility Business Manager. He has experience in photovoltaics, renewables and semiconductors, predominantly at the industry-research interface, with extensive international experience.

Area of Expertise:

R&D management; photovoltaics, semiconductors, and process technology.

Dr Nadia Court

Facility and Program Manager
USyd

Nadia is the Facility Manager for the ANFF NSW University of Sydney site based in the Sydney Nanoscience Hub.

Area of Expertise:

Nanofabrication, thin film deposition

Dr Fay Hudson

Process Manager
UNSW

Dr Hudson divides her time between the roles of ANFF NSW Process Manager and Senior Research Fellow in Prof. Dzurak’s research program.

Area of Expertise:

Fabrication expertise in micro- and nano-fabrication of nanoelectronic devices and silicon qubits

Karen Jury

Operations Manager
UNSW

Karen is the ANFF NSW Operations Manager, leading the operations team who contribute to the overall management and coordination of the business functions of the ANFF NSW Node.

Area of Expertise:

Financial, human resources and project management.

Gordon Bates

Laboratory Technical Manager
UNSW

Gordon leads the ANFF NSW technical team, liaising closely with the Facility Manager, Process Engineering team, UNSW Facilities, commercial suppliers and other stakeholders to ensure high uptime for ANFF NSW’s cleanrooms.

Area of Expertise:

Cleanroom design and operations

Joanna Szymanska

Process Engineer
UNSW

Joanna Szymanska is the process engineer responsible for technical management of semiconductor processing within ANFF Facility. She is responsible for provision of training, and new microfabrication process development.

Area of Expertise:

EBL, UV photolithography, RIE, ICP RIE, thin film deposition and device characterisation by profilometry, AFM, elipsometry, and probe measurements.

Dr Jeffrey Cheung

Process Engineer
UNSW

Jeffrey is the process engineer responsible for the epitaxial growth tools at ANFF NSW. His role involves user training and process optimisation for a wide range of materials grown in the Pascal pulsed laser epitaxial growth systems as well as growth of III-V heterostructures.

Area of Expertise:

Oxide heteroepitaxy, epitaxial nanocrystal growth of functional oxides, and molecular beam epitaxy of III-V materials

Ute Schubert

Process Engineer
UNSW

Ute Schubert is a process engineer at ANFF-NSW. She is responsible for provision of training and process development for microfabrication process.

Area of Expertise:

Solar cell and semiconductor processing, especially in the areas of ALD and PECVD

Pierrette Michaux

Process Engineer
UNSW

Pierrette Michaux is a Process Engineer specialising in Nanofabrication. She is responsible for provision of training and process development for microfabrication process with a focus in EBL and associated processes

Area of Expertise:

Microfabrication, especially in electron beam lithography, PDMS, plasma etching and deposition technology.

Dr Josiah Firth

Process Engineer
UNSW

Dr Josiah Fith is a process engineer at ANFF NSW. His role includes processing and training lab-users across a wide array of tool and process training, especially around photolithography, metal and oxide deposition and ITO.

Area of Expertise:

Microfabrication of biomedical devices using deep plasma etching and deposition.

Dr Andrew See

Acting Project Manager & Process Engineer
UNSW

Andrew is the Facility Projects Manager at ANFF-NSW. He is responsible for setting up research proposals for new ANFF users, managing user trainings, ongoing management of existing proposals, and project management.

Area of Expertise:

Project managerment and microfabrication in silicon and II-V materials

Dr Mark Gross

Senior Technical Officer
UNSW

Mark is a Senior Technical Officer. He currently provides a range of skills including equipment maintenance and operation, optical characterisation, plasma processing and tool design and modification.

Area of Expertise:

Plasma physics, thin film processing and semiconductor process engineering.

Prince Mathew

Technical Officer 
UNSW

Prince Mathew is an ANFF Equipment Engineer. He is responsible for maintenance, troubleshooting and repair of semiconductor laboratory process equipment and infrastructure.

Area of Expertise:

Electronics, SCADA programming, and semiconductor process tools

Aung Gyi

Technical Officer
UNSW

Aung Gyi is an ANFF Equipment Engineer. He is responsible for maintenance, troubleshooting and repair of semiconductor laboratory process equipment and infrastructure including PVD/CVD/ALD deposition systems, plasma-etchers, UV/electron lithography, high-temperature furnaces, ovens, PLC controls, gas delivery systems, packaging tools and metrology systems.

Area of Expertise:

Extensive experience in electronics, stepper lithography tools, and semiconductor process tools

Nora Cowen

Administrative Officer 
UNSW

Nora provides executive support to the ANFF NSW Node Director, Facility Manager, and Operations Manager.

Area of Expertise:

Office management and executive secretarial experience

Anna Adams

Administrative Assistant
UNSW

Anna provides executive support to the ANFF NSW Node Director, Facility Manager and Operations Manager.

Area of Expertise:

Executive support

Dolores Dunn

Adminstrative Assistant
USyd

Dolores is the administrative assistant for the ANFF NSW University of Sydney site and is responsible for purchasing and general administration

Area of Expertise:

University Administration

Ethel Ilagan

Process Engineer
USyd

Ethel’s expertise is in photolithography and is reponsible for the photolithography tools

Area of Expertise:

Photolithography tools, Wet processing, Microfluidic fabrication

Isabel Prone

Administration Manager
USyd

Isabel is the Administration Manager for ANFF NSW University of Sydney and is responsible for marketing and communications

Area of Expertise:

ANFF-NSW Sydney University Operations, marketing and communication, finance

Jacky (Weihong) He

Cleanroom Technical Officer
USyd

Jacky is responsible for the photomask fabrication facility and has expertise in a variety of nanofabrication techniques

Area of Expertise:

CAD Design, Photomask fabrication, Photolithography, Deposition, process engineering support

Jason Hwang

Process Engineer
USyd

Jason has expertise in nanofabrication of quantum electronic devices, particularly electron beam lithography and deposition tools

Area of Expertise:

Nanofabrication, Electron beam lithography, deposition, SEM, ellipsometer, ALD and RIE

Julie Miller

Business Manager
USyd

Julie’s role is business manager for the ANFF NSW University of Sydney site and she is responsible for implementing a variety of business systems in the facility

Area of Expertise:

Operations, business systems, stakeholder management

Justin Digweed

Senior Technical Officer
USyd

Justin is the polymer fibre facility manager for the ANFF Optofab/NSW University of Sydney site

Area of Expertise:

Fibre Fabrication, technical support

Mark Leworthy

Equipment Engineer
USyd

Mark is responsible for maintaining the i-line stepper and other lithography tools based at the University of Sydney

Area of Expertise:

Stepper and general photolithography equipment maintenance

Nelson Briones

Cleanroom Equipment Engineer
USyd

Nelson a senior equipment engineer with expertise in high vacuum systems, electronics and facilities management

Area of Expertise:

Equipment maintenance, electronics, mechanical, Hazmat trained, packaging, coding

Stephen Moody

Senior Process Engineer
USyd

Steve’s expertise is in characterisation having come to ANFF from a role with Microscopy Australia

Area of Expertise:

Characterisation - particularly focused ion beam (cross-sectioning, manipulation, lift-out), multi-beam nanofabrication

Can't find what you're looking for?

This website is under development at the moment, and not everything has been uploaded yet. If you can't find something you're looking for, it doesn't mean we don't have it – get in touch to see if we can help.

Contact Us