Node Director: Prof. Lorenzo Faraone
Phone: +61 8 6488 3104

Facility Manager: Prof. Mariusz Martyniuk
Phone: +61 8 6488 1905

Visit the website


ANFF WA provides a wealth of knowledge in advanced microelectronic, optoelectronic, and photonic materials, devices and systems. The node runs a complete, vertically integrated facility, from materials growth, through device design, fabrication and testing, to packaging and subsystem assembly.

The WA node is based at the University of Western Australia, Crawley. It incorporates the Microelectronics Research Group (MRG) in the School of Electrical, Electronic & Computer Engineering, led by Prof Lorenzo Faraone. The MRG provides a wealth of knowledge on advanced microelectronic, optoelectronic, and photonic materials, devices and systems.

Node Competencies

Specialist fields: Semiconductor optoelectronics; II-VI semiconductor growth; Micro- and nano- electro-mechanical-systems (MEMS and NEMS); Advanced sensors

Flagship Facilities and capabilities: Molecular beam epitaxy, Nanoindentation, DLTS, MEMS characterisation facilities


University of Western Australia


School of Electrical, Electronic & Computer Engineering,
Room 4.17, M018, The University of Western Australia
35 Stirling Highway, Crawley WA 6009

Professor Mariusz Martyniuk

Facility Manager

Marius manages the WA node. His expertise encompasses MEMS and optoelectronic devices for infrared and terahertz applications.

Area of Expertise:

Nanofabrication, thin-film materials and thin-film mechanics.

Dhirendra Tripathi

Process engineer

Dhirendra handles micro fabrication, processing and materials-characterisation at ANFF WA node

Area of Expertise:

MEMS and optical systems

Renjie Gu

MBE growth engineer

Renjie is a senior Molecular-beam epitaxy engineer who is experienced in semiconductor material exitaxy and device process engineering, working at ANFF- WA, the University of WA.

Area of Expertise:

Semiconductor material exitaxy, MEMS

Jarek Antoszewski

Senior MBE engineer

Jarek is providing expertise in IR detectors fabrication and characterisation.

Area of Expertise:

MBE semiconductor growth technology,

Gilberto Umana-Membreno

Senior industry support engineer

Gilberto provides support from device design and process development, to device characterisation and optimisation

Area of Expertise:

Micro/nanoelectronics and optoelectronics

Xiao Sun

Process engineer

Xiao provides training and technical support for a variety of tools and maintains the Node’s online booking system.

Area of Expertise:

Photolithography, wet and dry etching, annealing, metal deposition, optical characterisation

Ken Fogden

Technical manager

Ken is the Technical Manager, he is responsible for upgrades to the cleanroom itself and equipment within it, he has an internal and external networks of support staff.

Area of Expertise:

Facility maintenance

Karen Kader

Administrative officer

Karen provides administrative support to ANFF WA, University of Western Australia.

Area of Expertise:

Administrative support

Michal Zawierta

Process Engineer

Michal is involved in the design, fabrication and characterisation of optical microelectromechanical (MEMS) devices.

Area of Expertise:


Hemendra Kala

Industry support engineer

Hemendra assists the technical manager in the maintenance and upkeep of tools such as the MA6 mask aligner, Plamslab 100 ICPRIE system, Sentech instruments ICPECVD system, and thermal evaporation systems.

Area of Expertise:

Design, fabrication, characterisation and packaging of optoelectronic (SWIR-MWIR) and micro-electromechanical (MEMS) devices

Get Enlightened by ANFF

ANFF now offers nanofabrication training online. Click the button below to visit our learning resource, ANFF Enlightened, and gain the fab knowledge required to take your R&D further.

Visit ANFF Enlightened