New South Wales Node
ANFF NSW
Contact
Node Director: Prof. François Ladouceur
Email: f.ladouceur@unsw.edu.au
Phone: +61 2 9385 6311
Facility Manager: Matthew Boreland
Email: m.boreland@unsw.edu.au
Phone: +61 2 9385 7845
Overview
The NSW Node of ANFF is split between the University of New South Wales (UNSW) and the University of Sydney.
The core area of expertise for ANFF’s activities at UNSW includes nanoelectronics, with both Si-MOS and GaAs devices with sub-50 nm feature sizes routinely produced using the hub’s suite of high-resolution EBL systems within a 600 m2 laboratory complex providing cleanrooms with particle counts equivalent to ISO5, ISO6 and ISO7. The full range of research disciplines regularly supported by ANFF NSW @ UNSW is broad, encompassing quantum computing, biomedical devices, nanophotonics, medical detectors and photovoltaics.
ANFF NSW equipment at the University of Sydney forms part of the Research and Prototype Foundry (RFP), a Core Research Facility based at the Sydney Nanoscience Hub. The RFP enables the development of optical chips, electronic devices and new quantum science and technology via outstanding lithography, etching, deposition and metrology capabilities.
Node Competencies
Specialist fields: nanoelectronics (Si-MOS and GaAs); semiconductor device processing; optics; quantum technologies; photovoltaics.
Flagship facilities: high resolution EBL systems, including the flagship Raith 150TWO; UV lithography equipment; a range of deposition systems and etching tools; high temperature silicon oxidation, diffusion and annealing furnaces; wet chemical process lines; a suite of metrology tools; device packaging and bonding tools.
Locations
University of New South Wales
Address
Level 3 Newton Building
The University of New South Wales
Sydney NSW 2052
University of Sydney
Address
Sydney Nanoscience Hub
University of Sydney
NSW 2052
+61 2 9036 9050
Prof. François Ladouceur
Node Director
UNSW
Prof Ladouceur’s scientific contribution over the past thirty years covers a wide area of photonics technologies: from telecommunications, to sensing; from fabrication to simulation. Prof Ladouceur has lead large scale projects targeting the development of novel hybrid opto-electronics devices from their early design phase to their commercial realisation. In the process, Prof Ladouceur has gained considerable expertise in modelling, design, material sciences, packaging and interfacing.
Area of Expertise:
Photonics and Opto-Electronics
Prof. Simon Fleming
Deputy Director
USyd
Simon is Deputy Director of the ANFF NSW Node and the Academic Director of the University of Sydney facility.
Area of Expertise:
Fibre Fabrication
Sergio Leon-Saval
Associate Academic Director FBG Facility
USyd
Sergio is Associate Academic Director of the Advanced FBG Facility.
Area of Expertise:
Specialty optical fibres, fibre Bragg gratings, astrophotonics and optical instrumentation systems
Matthew Boreland
Facility Business Manager
UNSW
Matt joined ANFF in 2017 as the NSW Facility Business Manager. He has experience in photovoltaics, renewables and semiconductors, predominantly at the industry-research interface, with extensive international experience.
Area of Expertise:
R&D management; photovoltaics, semiconductors, and process technology.
Dr Fay Hudson
Process Manager
UNSW
Dr Hudson divides her time between the roles of ANFF NSW Process Manager and Senior Research Fellow in Prof. Dzurak’s research program.
Area of Expertise:
Fabrication expertise in micro- and nano-fabrication of nanoelectronic devices and silicon qubits
Karen Jury
Operations Manager
UNSW
Karen is the ANFF NSW Operations Manager, leading the operations team who contribute to the overall management and coordination of the business functions of the ANFF NSW Node.
Area of Expertise:
Financial, human resources and project management.
Gordon Bates
Laboratory Technical Manager
UNSW
Gordon leads the ANFF NSW technical team, liaising closely with the Facility Manager, Process Engineering team, UNSW Facilities, commercial suppliers and other stakeholders to ensure high uptime for ANFF NSW’s cleanrooms.
Area of Expertise:
Cleanroom design and operations
Dr Andrew See
Facility Projects Manager & Senior Process Engineer
UNSW
Andrew is the Facility Projects Manager at ANFF-NSW. He is responsible for setting up research proposals for new ANFF users, managing user trainings, ongoing management of existing proposals, and project management.
Area of Expertise:
Project managerment and microfabrication in silicon and II-V materials
Joanna Szymanska
Process Engineer
UNSW
Joanna Szymanska is the process engineer responsible for technical management of semiconductor processing within ANFF Facility. She is responsible for provision of training, and new microfabrication process development.
Area of Expertise:
EBL, UV photolithography, RIE, ICP RIE, thin film deposition and device characterisation by profilometry, AFM, elipsometry, and probe measurements.
Ute Schubert
Process Engineer
UNSW
Ute Schubert is a process engineer at ANFF-NSW. She is responsible for provision of training and process development for microfabrication process.
Area of Expertise:
Solar cell and semiconductor processing, especially in the areas of ALD and PECVD
Pierrette Michaux
Process Engineer
UNSW
Pierrette Michaux is a Process Engineer specialising in Nanofabrication. She is responsible for provision of training and process development for microfabrication process with a focus in EBL and associated processes.
Area of Expertise:
Microfabrication, especially in electron beam lithography, PDMS, plasma etching and deposition technology.
Dr Josiah Firth
Process Engineer
UNSW
Dr Josiah Fith is a process engineer at ANFF NSW. His role includes processing and training lab-users across a wide array of tool and process training, especially around photolithography, metal and oxide deposition and ITO.
Area of Expertise:
Microfabrication of biomedical devices using deep plasma etching and deposition.
Dr Hien Nguyen
Process Engineer
UNSW
Hien Nguyen graduated from materials science and engineering at UNSW Sydney, where she studied nanoscale properties of multiferroic materials and the growth of atomically thin films on different substrates and investigated electric and magnetic properties of these materials as well as phase transitions and topotactic transformations in complex oxides via a variety of equipment. In ANFF, as a process engineer, she is in charge of the south lab Laser MBE tool.
Area of Expertise:
Pulsed laser deposition
Dr Mark Gross
Senior Technical Officer
UNSW
Mark is a Senior Technical Officer. He currently provides a range of skills including equipment maintenance and operation, optical characterisation, plasma processing and tool design and modification.
Area of Expertise:
Plasma physics, thin film processing and semiconductor process engineering.
Aung Gyi
Technical Officer
UNSW
Aung Gyi is an ANFF Equipment Engineer. He is responsible for maintenance, troubleshooting and repair of semiconductor laboratory process equipment and infrastructure including PVD/CVD/ALD deposition systems, plasma-etchers, UV/electron lithography, high-temperature furnaces, ovens, PLC controls, gas delivery systems, packaging tools and metrology systems.
Area of Expertise:
Extensive experience in electronics, stepper lithography tools, and semiconductor process tools
Gopakumar Gopi
Senior Technical Officer
UNSW
Gopakumar Gopi is a Senior Technical Officer responsible for equipment and plant maintenance at UNSW. Prior to joining ANFF, he has worked as a maintenance technician in STM Singapore. His other professional experience includes working as a network engineer at Broadspectrum on NBN project, as a maintenance professional at Halliburton Australia in the oil and gas industry, and as an Electro/ Mechanical Technician Lead at Halliburton Singapore.
Area of Expertise:
Electronics
Lucy Wong
Senior Finance Officer
UNSW
Lucy is the ANFF-NSW Senior Finance Officer, responsible for the financial management functions of the ANFF-NSW Node. Lucy joined ANFF-NSW in 2018. She came to UNSW from the private sector where she worked extensively in internal auditing and risk management roles. Lucy is a UNSW Business School alumni and Chartered Accountant.
Area of Expertise:
Finance, Auditing and Risk Management
Nora Cowen
Administrative Officer
UNSW
Nora provides executive support to the ANFF NSW Node Director, Facility Manager, and Operations Manager.
Area of Expertise:
Office management and executive secretarial experience
Anna Adams
Administrative Assistant
UNSW
Anna provides executive support to the ANFF NSW Node Director, Facility Manager and Operations Manager.
Area of Expertise:
Executive support
Nelson Briones
Facility & Program Manager
USyd
Manages day-to day operational activity for facilities and equipment within the RPF.
Area of Expertise:
Semiconductor manufacturing (Equipment and Processes)
Dolores Dunn
Senior Administration Officer
USyd
Dolores is the administrative assistant for the ANFF NSW University of Sydney site and is responsible for purchasing and general administration.
Area of Expertise:
University Administration
Ethel Ilagan
Process Engineer
USyd
Ethel’s expertise is in photolithography and is responsible for the photolithography tools.
Area of Expertise:
Photolithography tools, Wet processing, Microfluidic fabrication
Gloria Qiu
Senior Process Engineer
USyd
Gloria is a process engineer for dry etch and PVD processes.
Area of Expertise:
Dry Etch, thin film deposition, wafer dicing
Rex Wang
Business and Data Visualisation Analyst
USyd
Rex supports designing, analysing and automating business processes and data analysis.
Area of Expertise:
Data analytics and business information systems
Goran Edvell
Senior Process Engineer: Advanced FBG Facility
USyd
Goran supports custom projects with application specific FBG design.
Area of Expertise:
Application specific FBG Design, Writing systems and Measurements
Liguo Luo
Senior Process Engineer: Advanced FBG Facility
USyd
Responsible for developing, engineering and fabricating high performance and high quality FBG devices at the Advanced FBG Facility.
Area of Expertise:
His expertise is in photonics devices, such as fibre Bragg gratings (FBGs), optical planar waveguide devices, and fibre lasers
Jacky (Weihong) He
Process Engineer: Nanofabrication
USyd
Jacky is responsible for the electron-beam lithography system and has expertise in a variety of nanofabrication techniques.
Area of Expertise:
CAD design, e-beam and photolithography, thin-film deposition, and wet chemical processes
Jason Hwang
Senior Process Engineer: Quantum Technologies
USyd
Jason has expertise in nanofabrication of quantum electronic devices, particularly electron beam lithography and deposition tools.
Area of Expertise:
Nanofabrication, EBL, SEM, ellipsometer, ALD, evaporator, sputterer, HF wet etch, wire bonding and die bonding
Julie Miller
Business Manager
USyd
Julie’s role is business manager for the ANFF NSW University of Sydney site and she is responsible for implementing a variety of business systems in the facility.
Area of Expertise:
Operations, business systems, stakeholder management
Justin Digweed
Senior Technical Officer
USyd
Justin is the polymer fibre facility manager for the ANFF Optofab/NSW University of Sydney site.
Area of Expertise:
Fibre Fabrication, technical support
Saw Saw Nyi Nyi Latt
Cleanroom Equipment Officer
USyd
Saw is a Cleanroom Equipment Officer responsible for process tools and equipment maintenance at ANFF-NSW University of Sydney.
Area of Expertise:
PVD/CVD/Dry etch tools maintenance
Iman Khandaker
Senior Process Engineer
USyd
Contact for dry etching & deposition.
Area of Expertise:
Dry etching, deposition & electron-beam lithography for photonic nanofabrication
Lawrence Farrar
Cleanroom Technical Officer
USyd
Lawrence is responsible for photomask fabrication and general cleanroom operations.
Area of Expertise:
Electron beam and photo-lithography, electron microscopy, and materials characterisation
Steve Moody
Senior Process Engineer
USyd
Steve’s expertise is in characterisation having come to ANFF from a role with Microscopy Australia.
Area of Expertise:
Characterisation - particularly focused ion beam (cross-sectioning, manipulation, lift-out), multi-beam nanofabrication