New South Wales Node
ANFF NSW
Contact
Node Director: Prof. Andrew Dzurak
Email: a.dzurak@unsw.edu.au
Phone: +61 2 9385 6311
Facility Manager: Matthew Boreland
Email: m.boreland@unsw.edu.au
Phone: +61 2 9385 7845
Overview
The NSW Node of ANFF is split between the University of New South Wales (UNSW) and the University of Sydney.
The core area of expertise for ANFF’s activities at UNSW includes nanoelectronics, with both Si-MOS and GaAs devices with sub-50 nm feature sizes routinely produced using the hub’s suite of high-resolution EBL systems within a 600 m2 laboratory complex providing cleanrooms with particle counts equivalent to ISO5, ISO6 and ISO7. The full range of research disciplines regularly supported by ANFF NSW @ UNSW is broad, encompassing quantum computing, biomedical devices, nanophotonics, medical detectors and photovoltaics.
ANFF NSW equipment at the University of Sydney forms part of the Research and Prototype Foundry (RFP), a Core Research Facility based at the Sydney Nanoscience Hub. The RFP enables the development of optical chips, electronic devices and new quantum science and technology via outstanding lithography, etching, deposition and metrology capabilities.
Node Competencies
Specialist fields: nanoelectronics (Si-MOS and GaAs); semiconductor device processing; optics; quantum technologies; photovoltaics.
Flagship facilities: high resolution EBL systems, including the flagship Raith 150TWO; UV lithography equipment; a range of deposition systems and etching tools; high temperature silicon oxidation, diffusion and annealing furnaces; wet chemical process lines; a suite of metrology tools; device packaging and bonding tools.
Locations
University of New South Wales
Address
Level 3 Newton Building
The University of New South Wales
Sydney NSW 2052
University of Sydney
Address
Sydney Nanoscience Hub
University of Sydney
NSW 2052
+61 2 9036 9050
Prof. Andrew Dzurak
Node Director
UNSW
Prof. Andrew Dzurak is the founding director of the ANFF NSW node and a Scientia Professor of Nanoelectronics in the School of Electrical Engineering and Telecommunications at UNSW.
Area of Expertise:
One of Australia’s leading experts in nanoelectronics and quantum computing technologies
Prof. Simon Fleming
Deputy Director
USyd
Simon is Deputy Director of the ANFF NSW Node and the Academic Director of the University of Sydney facility.
Area of Expertise:
Fibre Fabrication
Matthew Boreland
Facility Business Manager
UNSW
Matt joined ANFF in 2017 as the NSW Facility Business Manager. He has experience in photovoltaics, renewables and semiconductors, predominantly at the industry-research interface, with extensive international experience.
Area of Expertise:
R&D management; photovoltaics, semiconductors, and process technology.
Dr Nadia Court
Facility and Program Manager
USyd
Nadia is the Facility Manager for the ANFF NSW University of Sydney site based in the Sydney Nanoscience Hub.
Area of Expertise:
Nanofabrication, thin film deposition
Dr Fay Hudson
Process Manager
UNSW
Dr Hudson divides her time between the roles of ANFF NSW Process Manager and Senior Research Fellow in Prof. Dzurak’s research program.
Area of Expertise:
Fabrication expertise in micro- and nano-fabrication of nanoelectronic devices and silicon qubits
Karen Jury
Operations Manager
UNSW
Karen is the ANFF NSW Operations Manager, leading the operations team who contribute to the overall management and coordination of the business functions of the ANFF NSW Node.
Area of Expertise:
Financial, human resources and project management.
Gordon Bates
Laboratory Technical Manager
UNSW
Gordon leads the ANFF NSW technical team, liaising closely with the Facility Manager, Process Engineering team, UNSW Facilities, commercial suppliers and other stakeholders to ensure high uptime for ANFF NSW’s cleanrooms.
Area of Expertise:
Cleanroom design and operations
Joanna Szymanska
Process Engineer
UNSW
Joanna Szymanska is the process engineer responsible for technical management of semiconductor processing within ANFF Facility. She is responsible for provision of training, and new microfabrication process development.
Area of Expertise:
EBL, UV photolithography, RIE, ICP RIE, thin film deposition and device characterisation by profilometry, AFM, elipsometry, and probe measurements.
Dr Jeffrey Cheung
Process Engineer
UNSW
Jeffrey is the process engineer responsible for the epitaxial growth tools at ANFF NSW. His role involves user training and process optimisation for a wide range of materials grown in the Pascal pulsed laser epitaxial growth systems as well as growth of III-V heterostructures.
Area of Expertise:
Oxide heteroepitaxy, epitaxial nanocrystal growth of functional oxides, and molecular beam epitaxy of III-V materials
Ute Schubert
Process Engineer
UNSW
Ute Schubert is a process engineer at ANFF-NSW. She is responsible for provision of training and process development for microfabrication process.
Area of Expertise:
Solar cell and semiconductor processing, especially in the areas of ALD and PECVD
Pierrette Michaux
Process Engineer
UNSW
Pierrette Michaux is a Process Engineer specialising in Nanofabrication. She is responsible for provision of training and process development for microfabrication process with a focus in EBL and associated processes
Area of Expertise:
Microfabrication, especially in electron beam lithography, PDMS, plasma etching and deposition technology.
Dr Josiah Firth
Process Engineer
UNSW
Dr Josiah Fith is a process engineer at ANFF NSW. His role includes processing and training lab-users across a wide array of tool and process training, especially around photolithography, metal and oxide deposition and ITO.
Area of Expertise:
Microfabrication of biomedical devices using deep plasma etching and deposition.
Dr Andrew See
Acting Project Manager & Process Engineer
UNSW
Andrew is the Facility Projects Manager at ANFF-NSW. He is responsible for setting up research proposals for new ANFF users, managing user trainings, ongoing management of existing proposals, and project management.
Area of Expertise:
Project managerment and microfabrication in silicon and II-V materials
Dr Mark Gross
Senior Technical Officer
UNSW
Mark is a Senior Technical Officer. He currently provides a range of skills including equipment maintenance and operation, optical characterisation, plasma processing and tool design and modification.
Area of Expertise:
Plasma physics, thin film processing and semiconductor process engineering.
Prince Mathew
Technical Officer
UNSW
Prince Mathew is an ANFF Equipment Engineer. He is responsible for maintenance, troubleshooting and repair of semiconductor laboratory process equipment and infrastructure.
Area of Expertise:
Electronics, SCADA programming, and semiconductor process tools
Aung Gyi
Technical Officer
UNSW
Aung Gyi is an ANFF Equipment Engineer. He is responsible for maintenance, troubleshooting and repair of semiconductor laboratory process equipment and infrastructure including PVD/CVD/ALD deposition systems, plasma-etchers, UV/electron lithography, high-temperature furnaces, ovens, PLC controls, gas delivery systems, packaging tools and metrology systems.
Area of Expertise:
Extensive experience in electronics, stepper lithography tools, and semiconductor process tools
Nora Cowen
Administrative Officer
UNSW
Nora provides executive support to the ANFF NSW Node Director, Facility Manager, and Operations Manager.
Area of Expertise:
Office management and executive secretarial experience
Anna Adams
Administrative Assistant
UNSW
Anna provides executive support to the ANFF NSW Node Director, Facility Manager and Operations Manager.
Area of Expertise:
Executive support
Dolores Dunn
Adminstrative Assistant
USyd
Dolores is the administrative assistant for the ANFF NSW University of Sydney site and is responsible for purchasing and general administration
Area of Expertise:
University Administration
Ethel Ilagan
Process Engineer
USyd
Ethel’s expertise is in photolithography and is reponsible for the photolithography tools
Area of Expertise:
Photolithography tools, Wet processing, Microfluidic fabrication
Isabel Prone
Administration Manager
USyd
Isabel is the Administration Manager for ANFF NSW University of Sydney and is responsible for marketing and communications
Area of Expertise:
ANFF-NSW Sydney University Operations, marketing and communication, finance
Jacky (Weihong) He
Cleanroom Technical Officer
USyd
Jacky is responsible for the photomask fabrication facility and has expertise in a variety of nanofabrication techniques
Area of Expertise:
CAD Design, Photomask fabrication, Photolithography, Deposition, process engineering support
Jason Hwang
Process Engineer
USyd
Jason has expertise in nanofabrication of quantum electronic devices, particularly electron beam lithography and deposition tools
Area of Expertise:
Nanofabrication, Electron beam lithography, deposition, SEM, ellipsometer, ALD and RIE
Julie Miller
Business Manager
USyd
Julie’s role is business manager for the ANFF NSW University of Sydney site and she is responsible for implementing a variety of business systems in the facility
Area of Expertise:
Operations, business systems, stakeholder management
Justin Digweed
Senior Technical Officer
USyd
Justin is the polymer fibre facility manager for the ANFF Optofab/NSW University of Sydney site
Area of Expertise:
Fibre Fabrication, technical support
Nelson Briones
Cleanroom Equipment Engineer
USyd
Nelson a senior equipment engineer with expertise in high vacuum systems, electronics and facilities management
Area of Expertise:
Equipment maintenance, electronics, mechanical, Hazmat trained, packaging, coding
Stephen Moody
Senior Process Engineer
USyd
Steve’s expertise is in characterisation having come to ANFF from a role with Microscopy Australia
Area of Expertise:
Characterisation - particularly focused ion beam (cross-sectioning, manipulation, lift-out), multi-beam nanofabrication