ACT Node
Australian Capital Territory node
Contact
Node Director: Prof. Hoe Tan
Email: Hoe.Tan@anu.edu.au
Phone: +61 2 6125 0363
Facility Manager: Dr Horst Punzmann
Email: horst.punzmann@anu.edu.au
Phone: +61 2 6125 0001
Overview
ANFF ACT facility provides a range of capabilities and services for the micro/nanofabrication of photonic and related devices as well as the fabrication of waveguides and photonic crystals.
The node, located at the Australian National University, specialises in photonic/electronic materials growth, and the processing and fabrication of devices including micro electro-mechanical systems (MEMS). These capabilities provide a range of services for the fabrication of photonic and related devices as well as the production of waveguides and photonic crystals.
ANFF ACT works closely with two renowned research groups based at ANU’s Laser Physics Centre and the Department of Electronic Materials Engineering. These groups bring expertise in the capabilities of high-energy ion implantation, Si-etching, optical characterisation and two metal organic chemical vapour deposition (MOCVD) reactors for the growth of III-V compound semiconductor multilayers based on: GaAs, AIGaAs, InGaAs, InP, InGaAsP, InAlGaAs, GaSb, InSb, InGaAsN. These reactors enable the fabrication of nanowires, quantum dots, quantum wells, strained layers and devices.
Node Competencies
Specialist fields: micro/nano fabrication of photonic and related devices; fabrication of waveguides and photonic crystals; Micro electro-mechanical systems (MEMS).
Flagship facilities: Electron beam lithography (EBL); sputtering system for metal and dielectric multi-layer deposition; Cluster tool for dry etching and deposition; Dual beam focused ion beam; Nano imprint lithography.
Locations
Australian National University (ANU)
Address
Research School of Physics
The Stores, End of Garran Road
Australian National University
Canberra ACT 2601
+61 2 6125 7174
Professor Hoe Tan
Node Director
ANU
Prof. Hoe Tan is an expert in the epitaxy of compound semiconductors.
Area of Expertise:
Semiconductor materials, epitaxial growth
Dr Horst Punzmann
Facility Manager
ANU
Dr Horst Punzmann is an experimentalist in plasma physics and fluid mechanics.
Area of Expertise:
Plasma spectroscopy, liquid metamaterials, non-linear wave-flow interactions, bio-fluids
Dr Kaushal Vora
Operations and Processes Manager
ANU
Dr Kaushal Vora has broad experience in developing nanofabrication processes, cleanroom operations and user training.
Area of Expertise:
PVD, CVD, Lithography, EBL, Metrology, RTA
Dr Naiyin Wang
Process Engineer
ANU
Naiyin trains and assists users with plasma etching/deposition, while providing MOCVD support.
Area of Expertise:
Epitaxial growth and characterisation of compound semiconductors
Dr Li Li
FIB Officer
ANU
Dr Li trains and assists with SEM, milling, EBSD, and EDX, while also supporting SEM-CL activities.
Area of Expertise:
Characterisation and fabrication (SEM, FIB, EBSD, EDX)
Mr Sukanta Debbarma
Processing Officer
ANU
Sukanta maintains and performs processes for chalcogenide technologies on behalf of users.
Area of Expertise:
Thin films technology (Deposition and characterisation)
Ms Sue Berkeley
Node Administrator
ANU
Sue is in charge of liaising with users, billing, editing the website and producing the ANFF ACT the Newsletter.
Area of Expertise:
Administrative
Dr Mykhaylo Lysevych
MOCVD Officer
ANU
Mykhaylo maintains, trains and assists users with three MOCVD reactors, and also helps with XRD and thermal evaporation processes.
Area of Expertise:
Epitaxy of III-V semiconductors and characterisation
Mr Jnaneswara (John) Rao Saladi
Technical Officer
ANU
John maintains equipment and provides general infrastructure support.
Area of Expertise:
Technical support
Ms Gayatri Vaidya
EBL Officer
ANU
Gayatri trains and helps users with EBL matters, and supports other tools including the etching suite, electron-beam evaporation and SEM-CL.
Area of Expertise:
EBL technique and thin films
Dr Olivier Lee Cheong Lem
SEM-CL Officer
ANU
Olivier trains and assists users with SEM-CL, while supporting FIB, EBL, ALD activities
Area of Expertise:
Characterisation (SEM, CL, EDX) and thin films
