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Western Australian Node

The WA node is based at the University of Western Australia, Crawley. It incorporates the Microelectronics Research Group (MRG) in the School of Electrical, Electronic & Computer Engineering, led by Prof Lorenzo Faraone. The MRG provides a wealth of knowledge on advanced microelectronic, optoelectronic, and photonic materials, devices and systems.
The node runs a completely vertically integrated facility, from materials growth, through device design, fabrication and testing, to packaging and subsystem assembly.

Specialist fields:

  • Semiconductor optoelectronics
  • II-VI semiconductor growth
  • Micro- and nano- electro-mechanical-systems (MEMS and NEMS)
  • Advanced sensors

Flagship Facilities and capabilities:

  • Molecular beam epitaxy (e.g. for the HgCdTe material system),
  • Nanoindentation
  • MSA, DLTS, IR ellipsometry
  • Optical lithography
  • Plasma enhanced chemical vapour deposition systems (PECVD)
  • Reactive ion etching system (RIE)
  • Inductively coupled plasma reactive-ion etcher and chemical vapour deposition (RIE and CVD)
  • E-beam and thermal evaporators
  • Electrical measurements including: I-V, C-V, DLTS, Hall effect and LBIC measurements
  • MEMS characterisation facilities

Node Director: Prof Lorenzo Faraone
Phone: +61 8 6488 3104

Facility Manager: Prof Mariusz Martyniuk
Phone: +61 8 6488 1905

Website:, and