Capability directory

Types of fabrication



Or use capability keyword(s)

Australian Capital Territory node

Sukanta DebbarmaProcess Engineer - Australian National University, ACT node

Joint appointment with CUDOS

Prof Chennupati JagadishACT Node Director - Australian National University, ACT node

Jagadish is the director of the ANFF ACT node, an Australian Laureate Fellow, a Distinguished Professor and is Head of Semiconductor Optoelectronics and Nanotechnology Group in the Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, Australian National University (ANU). He received the B.Sc. degree from the Nagarjuna University, Guntur, India, the M.Sc(Tech) degree from the Andhra University, Waltair, India and the M.Phil. and Ph.D. degrees from the University of Delhi, India. He advises high tech industries in Australia and overseas in the field of photonics and has established a major research program in the field of optoelectronics and nanotechnology.

Dr Fouad KaroutaACT Facility Manager - Australian National University, ACT node

Fouad is the facility manager the ANFF ACT node. He has a chemistry degree from Lebanese University in Beirut, a PhD from Montpellier University (France) on epitaxy and LEDs of InGaAsSb structures. He was with an associate professor at the Opto-electronic Devices Section of the Department of Electrical Engineering, Eindhoven University of Technology (The Netherlands). He joined the ANU in 2009, has vast experience in managing research facilities and has been involved with research in III-V compound semiconductors (GaAs, InP, GaN) for optoelectronic and microelectronic applications for more than 20 years.

Jeff KealleyNode Administrator - Australian National University, ACT node

Jeff is responsible for the administrative functions of the ACT Node and has many years administrative experience working in universities (both at ANU and UWA) in areas such as botany, humanities, engineering, marine science, law and medicine. Jeff has worked at the Medical Education Unit, ANU College of Law and now the ACT node of ANFF within the ANU Research School of Physics & Engineering.

Dane KellyTechnical Officer - Australian National University, ACT node

Dr Li (Lily) LiFIB Process Engineer - Australian National University, ACT node

Dr Li Li completed her PhD in Material Physics in August 2012 from The University of Sydney (USyd) and was a Research Assistant at the Australian Centre for Microscopy & Microanalysis (ACMM) at USyd. Li has extensive experience of working in a multi-user facility and will continue our strong links with the AMMRF.Li Li will be responsible for Helios NanoLab 600 Dualbeam FIB flagship equipment. Her research interests include nanostructured materials, nanostructure characterisation, and the development of new FIB technology.

Dr Mark LockreyMicroanalysis Research Officer/SEM Process Engineer - Australian National University, ACT node

Mark received his PhD in Physics at the University of Technology, Sydney in 2015, where his PhD studies focused on cathodoluminescence (CL) analysis of III-nitride materials. Mark joined the Australian National University (ANU) in 2015 as the Micronalysis Research Officer and SEM Process Engineer for the ANFF ACT Node, where he operates the FESEM-CL system. Mark's research interests include electron-beam processing of materials, CL analysis of nano-materials and characterisation III-V semiconductors.

Dr Mykhaylo LysevychMOCVD Process Engineer - Australian National University, ACT node

Mykhaylo completed his Bachelor of Engineering in Electronic Engineering (Laser and Optoelectronic Systems) in 2003 at Lviv Polytechnic National University in the Ukraine. In 2005 he joined the Department of Electronic Materials Engineering (EME) at The Australian National University as an MPhil student working on “Design, Growth, Fabrication and Characterisation of AlInGaAs/InP Lasers”. A significant part of the project dealt with the development of the MOCVD growth of optical quality of materials containing aluminium on indium phosphide (InP).

His research interests include epitaxial growth, lasers, LEDs, optical waveguides, device design and numerical modelling, device fabrication and characterisation.

Dr Naeem ShahidEBL Process Engineer - Australian National University, ACT node

Naeem Shahid received his B.Sc degree from University of the Punjab, Lahore, Pakistan and his M.Sc degree from University of Engineering and Technology, Lahore, Pakistan. He has worked for five years on the ISO-coordination for a public sector organization in Islamabad Pakistan and did his PhD at the School of Information and Communication Technology, KTH Royal Institute of Technology, Kista, Sweden. As an Electron Beam Lithography (EBL) Process Engineer at the ANFF-ACT Node, Naeem's research is aimed at the development of electronic and optoelectronic devices based on artificially structured material systems, whose properties can be tailored by design to meet specific applications.

Jason StottProfessional staff - Australian National University, ACT node

Dr Kaushal VoraProcess Engineer - Australian National University, ACT node

Kaushal Vora received his BE in Electrical Engineering from Saurashtra University, India, his Masters degree in Microsystems Technology from Swinburne University of Technology, Melbourne and his PhD degree from La Trobe University, Melbourne. He has worked as an Research Officer at La Trobe University in the design, fabrication and testing of x-ray optics for phase-contrast imaging using µ-XCT. Kaushal joined The Australian National University (ANU) in 2009 as a process engineer for ANFF ACT node. He has developed a wide range of processes for our flagship equipment that includes Electron Beam/Thermal Evaporator, Inductively Coupled Plasma Etching, Nano Imprint Lithography/Hot Embossing, Plasma Enhanced Chemical Vapour Deposistion and the Sputter system.