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High Precision XYZ Motion Control States - Aerotech

High Precision XYZ Motion Control States (Aerotech)

Fabrication step: Optics and photonics
Function: Semiconductor optoelectronics and lasers
Location: Macquarie University
Purpose: Integrated with the 100 kHz REGA ultrafast laser to enable 3D processing of target materials
Material systems: The system will be predominantly engineered to process optical materials (glass crystalline and polymers and bulk and fibre formats)
Node: OptoFab
Scale/volume: Processing area: 10 x 100 x 200mm
Specifications/resolution: Air bearing translation stages with 1nm step size and resolution 5nm reproducibility. Scan speeds up to 100mm/min