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Beam delivery optics online imaging and beam diagnostics

Beam delivery optics online imaging and beam diagnostics

Fabrication step: Optics and photonics
Function: Semiconductor optoelectronics and lasers
Location: Macquarie University
Purpose: Quality assurance underpinning reproducibility in ultrafast machining system and laser beam aberration correction via a spatial light modulator (Hammanmatsu)
Material systems: as above
Node: OptoFab
Scale/volume: NA
Specifications/resolution: High damage threshold optics (mirrors lens polarisers) for delivering the beam to the translation stages. FROG to maintain laser pulse duration to within +/ 5 fs of nominal value (150fs). Online video camera to enable target alignment wihin +/ 1 micron. Spatial light modulator with refresh rate > 100Hz.