Capability directory

Types of fabrication

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Micro and nano fabrication capabilities
Physical vapor deposition Radio Frequency & Diode Sputtering - Melbourne Centre for Nanofabricationview more details
Ultraviolet flood source - Melbourne Centre for Nanofabricationview more details
Physical vapor deposition eBeam Evaporation - Melbourne Centre for Nanofabricationview more details
Vacuum Furnace Stack - Melbourne Centre for Nanofabricationview more details
Plasma Enhanced Chemical Vapour Deposition system PECVD - Melbourne Centre for Nanofabricationview more details
Vacuum Oven - Melbourne Centre for Nanofabricationview more details
Profilometer - Stylus contact mode - Melbourne Centre for Nanofabricationview more details
Water bath - Melbourne Centre for Nanofabricationview more details
Programmable hotplate - Melbourne Centre for Nanofabricationview more details
Wet benches Fume Hood Clean Etching HF KOH/TMAH processing Lift off - Melbourne Centre for Nanofabricationview more details
Pulsed Laser Deposition - Melbourne Centre for Nanofabricationview more details
Wet benches - Fume Hood for Cleaning Spinning Developing - Melbourne Centre for Nanofabricationview more details
Pulsed laser deposition - Melbourne Centre for Nanofabricationview more details
Inkjet printing and spotting - Melbourne Centre for Nanofabricationview more details
Rapid Diamond Film Deposition - Melbourne Centre for Nanofabricationview more details
Integration and screening laboratory - Melbourne Centre for Nanofabricationview more details
Reactive Ion Etcher system ICP RIE general - Melbourne Centre for Nanofabricationview more details
Lab balances and stirrers glassware - Melbourne Centre for Nanofabricationview more details
Reactive Ion Etcher system 2 ICP - RIE - Melbourne Centre for Nanofabricationview more details
Lab-Curing Oven - Melbourne Centre for Nanofabricationview more details