Capability directory

Types of fabrication

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Micro and nano fabrication capabilities
Rapid Diamond Film Deposition - Melbourne Centre for Nanofabricationview more details
Integration and screening laboratory - Melbourne Centre for Nanofabricationview more details
Reactive Ion Etcher system ICP RIE general - Melbourne Centre for Nanofabricationview more details
Lab balances and stirrers glassware - Melbourne Centre for Nanofabricationview more details
Reactive Ion Etcher system 2 ICP - RIE - Melbourne Centre for Nanofabricationview more details
Lab-Curing Oven - Melbourne Centre for Nanofabricationview more details
Shakers and vortex - Melbourne Centre for Nanofabricationview more details
Laminar flow cabinets (Bio and Clean room) - Melbourne Centre for Nanofabricationview more details
Single-Front Side Mask Aligner with Nanoimprint Lithography - UV NIL - Melbourne Centre for Nanofabricationview more details
Ni Electroforming DC - Melbourne Centre for Nanofabricationview more details
Sol gel deposition system - Melbourne Centre for Nanofabricationview more details
Oxygen plasma etcher - Melbourne Centre for Nanofabricationview more details
Spinner - general purpose - Melbourne Centre for Nanofabricationview more details
Oxygen plasma etcher - Melbourne Centre for Nanofabricationview more details
Hi-tech oxidation furnace - Melbourne Centre for Nanofabricationview more details
Paralene Coaters - Melbourne Centre for Nanofabricationview more details
Ultrasonic Cleaners / Ultrasonicator - Melbourne Centre for Nanofabricationview more details
Physical vapor deposition Radio Frequency & Diode Sputtering - Melbourne Centre for Nanofabricationview more details
Ultraviolet flood source - Melbourne Centre for Nanofabricationview more details
Physical vapor deposition eBeam Evaporation - Melbourne Centre for Nanofabricationview more details