Capability directory

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Micro and nano fabrication capabilities
Precision Etching and Coating System and Perpendicular Slope Cutting - Monash Universityview more details
SUSSMicrotec Delta 80RC spinner - Monash Universityview more details
SUSSMicrotec MA6 Aligner - Monash Universityview more details
Vacuum oven small spin coater - Monash Universityview more details
Wet etch suite - Monash Universityview more details
Quartz crystal microgravimetry - Melbourne Universityview more details
Class 35 laminar flow cabinet - Melbourne Universityview more details
Class 350 Cleanroom - Melbourne Universityview more details
Colutron low energy ion implanter - Melbourne Universityview more details
NEC 5U Pelletron - Melbourne Universityview more details
Neutronix Quintel Q4000 6 Ultraviolet Photolithography - Melbourne Universityview more details
Automated Spinner - Melbourne Centre for Nanofabricationview more details
Electron Beam Lithography EBL - Melbourne Centre for Nanofabricationview more details
Hot Embossing System - Melbourne Centre for Nanofabricationview more details
Hot Roll Laminator - Melbourne Centre for Nanofabricationview more details
Anisotropic Ar plasma etching tool ion miller - Melbourne Centre for Nanofabricationview more details
Atomic Layer Deposition - Melbourne Centre for Nanofabricationview more details
Au electroplating - Melbourne Centre for Nanofabricationview more details
Profilometer - Stylus contact mode - Melbourne Centre for Nanofabricationview more details
Water bath - Melbourne Centre for Nanofabricationview more details