Capability directory

Types of fabrication

Function

Location

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Micro and nano fabrication capabilities
Langmuir Blodgett Trough - Swinburne Universityview more details
Ultraviolet Flood light Source - Swinburne Universityview more details
Au electroplating - Royal Melbourne Institute of Technology Universityview more details
Class 1000 cleanroom - Royal Melbourne Institute of Technology Universityview more details
Diamond saw - Royal Melbourne Institute of Technology Universityview more details
Nano imprint lithography NIL - Royal Melbourne Institute of Technology Universityview more details
Optical polishing - Royal Melbourne Institute of Technology Universityview more details
Photolithography - Royal Melbourne Institute of Technology Universityview more details
Plasma etcher - Royal Melbourne Institute of Technology Universityview more details
Plasma Vapour Deposition electron beam evaporation - Royal Melbourne Institute of Technology Universityview more details
Plasma Vapour Deposition thermal evaporation - Royal Melbourne Institute of Technology Universityview more details
Profiler - Royal Melbourne Institute of Technology Universityview more details
RF sputter deposition system - Royal Melbourne Institute of Technology Universityview more details
Tube furnace access - Royal Melbourne Institute of Technology Universityview more details
Plasma etcher - Monash Universityview more details
Cressington 208HR Sputter Coater - Monash Universityview more details
Dynavac SC150 Sputter Coater - Monash Universityview more details
Precision Etching and Coating System and Perpendicular Slope Cutting - Monash Universityview more details
SUSSMicrotec Delta 80RC spinner - Monash Universityview more details
SUSSMicrotec MA6 Aligner - Monash Universityview more details