Capability directory

Types of fabrication

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Micro and nano fabrication capabilities
Anneal Furnace - General Purpose - University of New South Walesview more details
Hollow-cathode reactive ion etching system - University of New South Walesview more details
Anneal Furnace - Clean Anneal - University of New South Walesview more details
Vacutec reactive ion etching system - University of New South Walesview more details
Jipelec rapid thermal annealing furnace - University of New South Walesview more details
Denton O2 plasma asher - University of New South Walesview more details
Muffle furnace - University of New South Walesview more details
Lesker PVD75 e-beam evaporator - MOS - University of New South Walesview more details
FEI Sirion scanning electron microscope EBL - University of New South Walesview more details
Lesker PVD75 e-beam evaporator - general purpose - University of New South Walesview more details
Dektak 2A profilometer - University of New South Walesview more details
Lesker Thermal Evaporator - University of New South Walesview more details
Dektak 3030 profilometer - University of New South Walesview more details
Edwards thermal evaporator - University of New South Walesview more details
Dektak 150 profilometer - University of New South Walesview more details
HHV sputtering system - University of New South Walesview more details
Vertical UV lamp - University of Adelaideview more details
Dip coaters - Swinburne Universityview more details
Langmuir Blodgett Trough - Swinburne Universityview more details
Ultraviolet Flood light Source - Swinburne Universityview more details