Capability directory

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Micro and nano fabrication capabilities
HiTech benchtop oxidation furnace - University of Queenslandview more details
Veeco Wyko NT1100 optical profiler - University of Queenslandview more details
EVG-620 mask aligner - University of Queenslandview more details
MIVA 1624E T3 photoplotter - University of Queenslandview more details
Neutronix Quintell 7500 UV mask aligner - University of Queenslandview more details
XeF2 etcher - University of Queenslandview more details
Vacutec reactive ion etching system - University of New South Walesview more details
Jipelec rapid thermal annealing furnace - University of New South Walesview more details
Denton O2 plasma asher - University of New South Walesview more details
Muffle furnace - University of New South Walesview more details
Lesker PVD75 e-beam evaporator - MOS - University of New South Walesview more details
FEI Sirion scanning electron microscope EBL - University of New South Walesview more details
Lesker PVD75 e-beam evaporator - general purpose - University of New South Walesview more details
Dektak 2A profilometer - University of New South Walesview more details
Lesker Thermal Evaporator - University of New South Walesview more details
Dektak 3030 profilometer - University of New South Walesview more details
Edwards thermal evaporator - University of New South Walesview more details
Dektak 150 profilometer - University of New South Walesview more details
HHV sputtering system - University of New South Walesview more details
Edwards sputtering system - University of New South Walesview more details