Capability directory

Types of fabrication

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Micro and nano fabrication capabilities
Electrochemistry suite - University of Queenslandview more details
HMDS hexamethyldisilzane oven - University of Queenslandview more details
Glove box with integrated vacuum evaporators - University of Queenslandview more details
Litrex 70 inkjet printer - University of Queenslandview more details
ICP enhanced chemical vapour deposition ICPECVD - University of Western Australiaview more details
Plasma therm deep reactive ion etcher DRIE - University of Queenslandview more details
Edwards sputtering system - University of New South Walesview more details
CNT Savannah S200 atomic layer deposition system ALD - University of New South Walesview more details
Raith 150TWO electron beam lithography system EBL - University of New South Walesview more details
Vacutec Plasma Enhanced Chemical Vapour Deposition System - University of New South Walesview more details
FEI Sirion/NPGS electron beam lithography system EBL - University of New South Walesview more details
Oxidation Furnace - Dry Oxidation - University of New South Walesview more details
Karl Suss MA6/BA6 mask aligner - University of New South Walesview more details
Oxidation Furnace - General Purpose - University of New South Walesview more details
Quintel Q6000 mask aligner single chip - University of New South Walesview more details
Diffusion Furnace - Boron - University of New South Walesview more details
Quintel Q6000 mask aligner Single wafer - University of New South Walesview more details
Diffusion Furnace - Phosphorus - University of New South Walesview more details
Suite of resist processing tools (spinners and hotplates) - University of New South Walesview more details
Anneal Furnace - General Purpose - University of New South Walesview more details