Capability directory

Types of fabrication

Function

Location

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Micro and nano fabrication capabilities
ISO Class 5 & 6 cleanrooms - University of South Australiaview more details
Spin coater - University of South Australiaview more details
Mask aligner with nano imprint lithography - University of South Australiaview more details
Substrate bonder - hot embosser - University of South Australiaview more details
Deep reactive ion etcher DRIE - University of South Australiaview more details
Optical profilometer - University of South Australiaview more details
Plasma asher - University of South Australiaview more details
Sputter coater - University of South Australiaview more details
Prog 200 reactive ion etching system RIE - University of Queenslandview more details
AJA sputtering system RF/DC - University of Queenslandview more details
Wet bench - University of Queenslandview more details
HiTech benchtop oxidation furnace - University of Queenslandview more details
Veeco Wyko NT1100 optical profiler - University of Queenslandview more details
EVG-620 mask aligner - University of Queenslandview more details
MIVA 1624E T3 photoplotter - University of Queenslandview more details
Neutronix Quintell 7500 UV mask aligner - University of Queenslandview more details
XeF2 etcher - University of Queenslandview more details
Spin coater - University of Queenslandview more details
157 nm F2 laser exposure system - University of Queenslandview more details
E Beam evaporation system - University of Queenslandview more details