Capability directory

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Micro and nano fabrication capabilities
OAI collimated light source system - University of Queenslandview more details
EVG-520iS semi automated hot embossing tool - University of Queenslandview more details
Stylus surface profiler Dektak 150 - University of Queenslandview more details
Inorganic thin film coating - University of Wollongongview more details
Electrochemcial Device Reel 2 Reel Printer - University of Wollongongview more details
Spatial light modulator SLM - University of Western Australiaview more details
Dektak 150 - University of Western Australiaview more details
optical profiler Zygo New View - University of Western Australiaview more details
Molecular Beam Epitaxy facility MBE - University of Western Australiaview more details
Mask Aligners MAG & MJB3 - University of Western Australiaview more details
Plasma Enhanced Chemical Vapour Deposition Systems PECVD - University of Western Australiaview more details
Reactive Ion Etching System RIE - University of Western Australiaview more details
Inductively coupled plasma Reactive-ion etcher ICP RIE - University of Western Australiaview more details
Inductively coupled plasma chemical vapour deposition ICPCVD - University of Western Australiaview more details
E-beam and thermal evaporators - University of Western Australiaview more details
Rapid Thermal Annealing System - University of Western Australiaview more details
General Clean Room Facilities - University of Western Australiaview more details
High resolution head for DWL - University of Sydneyview more details
i line stepper - University of Sydneyview more details
Reactive Ion Etcher RIE - University of Sydneyview more details