Capability directory

Types of fabrication

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Micro and nano fabrication capabilities
Qualiflow JetFirst 100, rapid thermal annealing system - Australian National Universityview more details
SVG 8600 coat/develop track - Australian National Universityview more details
Inductively coupled plasma reactive ion etching ICP-RIE - Australian National Universityview more details
Pfeiffer Classic 250 DC sputter - Australian National Universityview more details
EVG 620 and 520HE mask aligner (NIL) and hot embosser - Australian National Universityview more details
High energy ion implanter - Australian National Universityview more details
Low energy ion implanter - Australian National Universityview more details
Ion Implanter - Australian National Universityview more details
Barrel etcher PVA Tepla Gigabatch 310 M - Australian National Universityview more details
Vacuum oven - Australian National Universityview more details
ATC-2400-V AJA sputter system - Australian National Universityview more details
E-beam lithography EBL - RAITH 150 - Australian National Universityview more details
E-Beam Evaporator EBL - Australian National Universityview more details
Inductively coupled plasma ICP - Australian National Universityview more details
AIXTRON metal organic chemical vapour deposition MOCVD - Australian National Universityview more details
Plasma enhanced chemical vapour deposition PECVD - Australian National Universityview more details