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Rapid Thermal Annealing System

Rapid Thermal Annealing System

Fabrication step: Micro and nano fabrication
Function: Furnace
Location: University of Western Australia
Purpose: Alloying, recrystallisation
Material systems: Si-N-O/ H-Cd-Te/ Al-Ga-N-O/ BIG
Node: Western Australia
Scale/volume: up to 4 inch wafers
Specifications/resolution: 50C/s 1000C max O2 N2 vacuum