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Molecular Beam Epitaxy facility MBE

Molecular Beam Epitaxy facility MBE

Fabrication step: Micro and nano fabrication
Function: Deposition
Location: University of Western Australia
Purpose: IR detectors & MEMNs
Material systems: Cd/ Te/ Hg
Node: Western Australia
Scale/volume: Up to 50mm wafers
Specifications/resolution: HgCdTe MBE with new Hg and Te cells, new vacuum system, high precison and stability PID controller, manipulator, RHEED gun, in-situ monitoring and X-ray diffraction and ellipsometry capabilities