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Mask Aligners MAG & MJB3

Mask Aligners MAG & MJB3

Fabrication step: Micro and nano fabrication
Function: Lithography
Location: University of Western Australia
Purpose: Detectors & MEMs
Material systems: Si/ silica/ chalcogenide/ telluride
Node: Western Australia
Scale/volume: MJB3: up to 3 inch wafers; MAG: up to 6 inch wafers;
Specifications/resolution: MJB3: 5um; MAG: 0.7um;