Capability directory

Types of fabrication

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E-beam and thermal evaporators

E-beam and thermal evaporators

Fabrication step: Micro and nano fabrication
Function: Deposition
Location: University of Western Australia
Purpose: contacts/masking/structural
Material systems: Au/Cr/Pl/Ge/SiO/Ni/Ti/In/Al
Node: Western Australia
Scale/volume: up to 2 inch wafers
Specifications/resolution: Au/Cr/Pl/Ge/SiO/Ni/Ti/In/Al