Capability directory

Types of fabrication



Or use capability keyword(s)

Dektak 150

Dektak 150

Fabrication step: Micro and nano fabrication
Function: Clean rooms and associated equipment
Location: University of Western Australia
Purpose: Step height/ bowing/ surface topography
Material systems: Various
Node: Western Australia
Scale/volume: up to 6 inch wafers
Specifications/resolution: nanometer vertical accuracy