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Ozone cleaner

The ozone cleaner provides researchers with a non-chemical alternative to removing organic materials from a variety of substrates. With the use of UV radiation, ozone and heat, it can be utilized in pre cleaning wafers, improving surface wettability and photoresist descumming.

Fabrication step: Micro and nano fabrication
Function: Clean rooms and associated equipment
Location: Melbourne Centre for Nanofabrication
Purpose: The ozone cleaner can be used for cleaning silicon wafers in a variety of experiments. For example, involving self assembly of gold nanoparticles for improving surface chemistry of the wafers.
Node: Victoria
Specifications/resolution: SAMCO UV1 Benchtop system