Capability directory

Types of fabrication

Function

Location

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Spin coater

Capable of applying uniform thickness polymer films, such as a resist to substrates. The Karl Suss Delta 80 spin coater is further enhanced by a “Gyrset” to help achieve uniformity, especially on square and rectangular substrates and to minimise edge bead build up.

A programmable dispense arm for precise fluid dispensing allows for the spin speed to be smoothly varied from 100 to 7000 rpm. Programs with different resists can be selected via teh menu driven software enabling both thin and thick film layers.

Universal coating system with GYRSET® for up to 8 inch wafers

Fabrication step: Micro and nano fabrication
Function: Microfluidics & clean rooms and associated equipment
Location: University of South Australia
Purpose: To evenly and repeatibily coat substrates with polymer films
Material systems: Glasses, semiconductor, metals and polymers
Node: South Australia
Scale/volume: Up to 8 inch diametre substrates and with an automatic material dispenser