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Mantis NanoCluster Source

The Mantis NanoCluster source consists of a high-pressure sputtering source to generate beams of sub-nano and nanoscale particles from almost any elemental or alloy base material. Nanoparticles can be generated with as few as two atoms up to those with diameters exceeding 15 nm (~106 amu). Reactive particle generation in the source will allow oxide-, nitride- or carbide-particles to be formed.

The unit is fitted with an in-line quadrupole mass filter allowing mass selection of the negatively charged nanoparticle beam with a size resolution of 2%, thus allowing control of the particle size into the deposition chamber. The mass-selected ionised particles can then be decelerated to very low kinetic energy and either (i) "soft-landed" onto surfaces to retain their inherent morphology or (ii) accelerated to a biased surface to impact the particles allowing partial or total interface-mixing into the substrate.

The ability to generate and transfer samples under UHV means that an armoury of physical and chemical analytical techniques available can be used to characterise the nano-particles.

Fabrication step: Micro and nano fabrication
Function: Deposition
Location: Flinders University
Purpose: To deposit size-selected nanoparticles on a surface
Material systems: Any
Node: South Australia
Scale/volume: 10x10mm sample
Specifications/resolution: Nanoparticle size selection resolution 2%