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Stylus surface profiler Dektak 150

The Dektak 150 surface profiler is an advanced thin and thick film step height measurement tool capable of measuring steps below 100A.

It also measures samples up to six inches in dimension and up to four inches think. With the scan-stitching package, the system can perform even longer scans for stress measurements on larger wafers.

The Dektak 150 can be used to profile surface topography and waviness, as well as to measure surface roughness in the nanometer range. The system provides a step-height repeatability of 0.6nm

Fabrication step: Micro and nano fabrication
Function: Clean rooms and associated equipment
Location: University of Queensland
Node: Queensland