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Clean room

Class 1000 clean room

Fabrication step: Micro and nano fabrication
Function: Clean rooms and associated equipment
Location: Griffith University
Purpose: Space efficient housing of processing equipment enabling low defectivity and contaminating processing with Sub wafer fab for housing auxiliary equipment
Material systems: Semiconductor
Node: Queensland
Specifications/resolution: Main ball room cleanroom better than class 1000/M4.5 temp 21° +/ 1