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Class 100 and 1000 Cleanroom Facilities

Class 100 / 1000 Cleanroom Facilities

Fabrication step: Micro and nano fabrication
Function: Clean rooms and associated equipment
Location: Bandwidth Foundry International
Purpose: To provide a clean area to produce photomasks
Material systems: n/a
Node: OptoFab
Scale/volume: 147 m2
Specifications/resolution: Approximately 100 m2 at Class 10 000 and 50 m2 at Class 1 000