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Lesker PVD75 e-beam evaporator - general purpose

Lesker PVD75 e-beam evaporator - general purpose

Fabrication step: Micro and nano fabrication
Function: Deposition
Location: University of New South Wales
Purpose: directional deposition of non-MOS-compatible metals
Material systems: Au and other non-MOS compatible materials
Node: New South Wales
Scale/volume: Single wafer up to 150mm diameter
Specifications/resolution: supporting non-MOS-compatible materials