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Dektak 3030 profilometer

Dektak 3030 profilometer

Fabrication step: Micro and nano fabrication
Function: Clean rooms and associated equipment
Location: University of New South Wales
Purpose: surface profilometry
Material systems: Most hard materials
Node: New South Wales
Scale/volume: Single wafer up to 150mm diameter
Specifications/resolution: 10nm to 130micron depth measurement capability