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Anneal Furnace - General Purpose

Anneal Furnace (General Purpose)

Fabrication step: Micro and nano fabrication
Function: Furnace
Location: University of New South Wales
Purpose: high temperature annealing
Material systems: Most hard materials
Node: New South Wales
Scale/volume: Multiple (up to 20) wafers up to 50mm diameter
Specifications/resolution: 215-1100C; gases: O2, N2, forming gas (95% N2, 5% H2)