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XPS Auger electron spectroscopy system

X-ray photoelectron spectroscopy (XPS) is a quantitative technique that measures the composition and electronic state of the elements are on the surface of a sample. Spectra are obtained by irradiating a sample with a beam of X-rays while measuring the number of electrons of a specific energy that escape from the top 1 to 10 nm of the surface.

XPS requires that the sample is exposed to ultra-high vacuum (UHV) conditions. Detection limits for most of the elements are in the range of parts per thousand.

Fabrication step: Characterisation
Function: Surface - thin films
Location: University of Newcastle
Purpose: Determination of elemental composition and chemical bonding on sample surfaces
Material systems: Polymers, organics, dielectrics, metals, semiconductors, glasses and ceramics
Node: Materials
Scale/volume: Maximum sample size: 20 x 20 mm
Specifications/resolution: X-ray spot size: 5 mm and base pressure: 10-10 mbar